Appleby, Michael P. (2268 Stargate La., Charlottesville, VA, US)
Fraser, Iain (337 Deer Dr., Ruckersville, VA, US)
Atkinson, James E. (3546 Stoney Point Rd., Charlottesville, VA, US)

Plaque It! Sponsored by: Flash of Genius

10/479335

08/12/2008

06/05/2002

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JP02099260

April, 1990

CASTING METHOD

Desai, Upendra, “New Fabrication Methodology for Fine Feature-High Aspect Ratio Structures Made from High Z Materials”, Part of the SPIE Conference on Micromachining and Microfabrication Process Technology, Sep. 22, 1999, 7 pages, SPIE vol. 3874, US.
Hexcel Corporation, “Hex Web Honeycomb Attributes and Properties”, Nov. 1, 1999, 39 pages.

Tentoni, Leo B.

Michael Haynes PLC
Haynes, Michael N.
Jensen, Dale R.

CROSS REFERENCE TO RELATED APPLICATIONS

This application claims priority to, and incorporates by reference in their entirety, each of: pending U.S. Application Ser. No. 60/295,564, filed 5 Jun. 2001, and pending U.S. Application Ser. No. 60/339,773, filed 17 Dec. 2001.

What is claimed is:

1. A method of forming a casting, comprising: filling a mold having a stacked plurality of lithographically-derived micro-machined metallic foil layers with a first casting material to form a first cast product having an aspect ratio of greater than 10:1, the stacked plurality of lithographically-derived micro-machined metallic foil layers defining a protruding undercut; and demolding the first cast product from the mold, said first cast product comprising a plurality of product surfaces that define a periphery of a layer-less volume of said first cast product, a product surface from said plurality of product surfaces comprising a plurality of 3-dimensional micro-features that substantially spatially invertedly replicate a mold surface formed by said stacked plurality of metallic foil layers.

2. The method of claim 1, further comprising providing the mold.

3. The method of claim 1, further comprising, for each of the stacked plurality of lithographically-derived micro-machined layers, designing a feature associated with the layer.

4. The method of claim 1, further comprising designing a feature associated with all of the stacked plurality of lithographically-derived micro-machined layers of the mold.

5. The method of claim 1, further comprising micro-machining each of the stacked plurality of lithographically-derived micro-machined layers.

6. The method of claim 1, further comprising, for each of the stacked plurality of lithographically-derived micro-machined layers, micro-machining a feature associated with the layer.

7. The method of claim 1, further comprising micro-machining a feature associated with all of the stacked plurality of lithographically-derived micro-machined layers.

8. The method of claim 1, further comprising stacking the stacked plurality of lithographically-derived micro-machined layers.

9. The method of claim 1, further comprising aligning the stacked plurality of lithographically-derived micro-machined layers.

10. The method of claim 1, further comprising bonding the stacked plurality of lithographically-derived micro-machined layers.

11. The method of claim 1, further comprising clamping the stacked plurality of lithographically-derived micro-machined layers.

12. The method of claim 1, further comprising securing the stacked plurality of lithographically-derived micro-machined layers.

13. The method of claim 1, further comprising affixing the stacked plurality of lithographically-derived micro-machined layers.

14. The method of claim 1, further comprising fabricating the mold.

15. The method of claim 1, further comprising allowing the first casting material to solidify to form the first cast product.

16. The method of claim 1, further comprising surrounding the first cast product with a second casting material.

17. The method of claim 1, further comprising surrounding the first cast product with a second casting material and allowing the second casting material to solidify into a second cast product.

18. The method of claim 1, further comprising surrounding the first cast product with a second casting material and allowing the second casting material to solidify into a nonplanar second cast product.

19. The method of claim 1, further comprising forming the first cast product into a non-planar shape.

20. The method of claim 1, further comprising forming the first cast product into a non-planar shape and surrounding the formed first cast product with a second casting material and allowing the second casting material to solidify into a nonplanar second cast product.

21. The method of claim 1, further comprising surrounding the first cast product with a second casting material and demolding a second cast product formed from the second casting material.

22. The method of claim 1, wherein the first casting material comprises a flexible polymer.

23. The method of claim 1, wherein the first casting material comprises an elastomer.

24. The method of claim 1, wherein the first casting material comprises silicone rubber.

25. The method of claim 1, wherein the stacked plurality of lithographically-derived micro-machined layers define a cavity having a protruding undercut.

26. The method of claim 1, wherein the stacked plurality of lithographically-derived micro-machined layers define a plurality of cavities therein.

27. The method of claim 1, further comprising positioning an insert into a cavity defined by the stacked plurality of lithographically-derived micro-machined layers.

28. The method of claim 1, further comprising positioning an insert into a cavity defined by the stacked plurality of lithographically-derived micro-machined layers, the insert occupying only a portion of the cavity.

29. The method of claim 1, further comprising positioning an insert into a cavity defined by the stacked plurality of lithographically-derived micro-machined layers prior to said filling the mold with the first casting material.

30. The method of claim 1, further comprising positioning a lithographically-derived micro-machined insert into a cavity defined by the stacked plurality of lithographically-derived micro-machined layers prior to said filling the mold with the first casting material.

31. The method of claim 1, wherein the first cast product has an aspect ratio greater than 100:1.

32. The method of claim 1, further comprising surrounding the first cast product with a second casting material and demolding a second cast product formed from the second casting material, the second cast product having an aspect ratio greater than 100:1.

33. The method of claim 1, wherein a cavity defined by the stacked plurality of lithographically-derived micro-machined layers has an aspect ratio greater than 100:1.

34. The method of claim 1, wherein the first cast product is an end product.

35. The method of claim 1, further comprising surrounding the first cast product with a second casting material and demolding a second cast product formed from the second casting material, the second cast product being an end product.

36. The method of claim 1, wherein the first cast product is attached to a substrate.

37. The method of claim 1, wherein the first cast product is a free-standing structure.

38. A method of forming a casting, comprising: filling a mold having a stacked plurality of lithographically-derived micro-machined metallic foil layers with a first casting material to form a first cast product having an aspect ratio of greater than 10:1, the stacked plurality of lithographically-derived micro-machined metallic foil layers defining a protruding undercut; and demolding the first cast product from the mold, the first cast product reflecting the protruding undercut, said first cast product comprising a plurality of product surfaces that define a periphery of a layer-less volume of said first cast product, a product surface from said plurality of product surfaces comprising a plurality of 3-dimensional micro-features that substantially spatially invertedly replicate a mold surface formed by said stacked plurality of metallic foil layers.

39. A method of fabricating a stack lamination mold, comprising: lithographically micro-machining each of a plurality of metallic foil layers; and assembling the plurality of layers into a stack that defines a protruding undercut and an aspect of greater than 10:1.

40. A lithographically-derived micro-machined metallic foil stack lamination mold that defines a protruding undercut and that defines an aspect ratio of greater than 10:1.

41. The lithographically-derived micro-machined metallic foil stack lamination mold of claim 40, wherein said mold is a positive replication of a predetermined end product.

42. The lithographically-derived micro-machined metallic foil stack lamination mold of claim 40, wherein said mold is a negative replication of a predetermined end product.

43. The lithographically-derived micro-machined metallic foil stack lamination mold of claim 40, wherein said mold defines at least one feature having an aspect ratio of greater than 10:1.

44. The lithographically-derived micro-machined metallic foil stack lamination mold of claim 40, wherein said mold defines at least one feature having an aspect ratio of greater than 15:1.

45. The lithographically-derived micro-machined metallic foil stack lamination mold of claim 40, wherein said mold defines at least one feature having an aspect ratio of greater than 20:1.

46. The lithographically-derived micro-machined metallic foil stack lamination mold of claim 40, wherein said mold defines at least one feature having an aspect ratio of greater than 25:1.

47. The lithographically-derived micro-machined metallic foil stack lamination mold of claim 40, wherein said mold defines at least one feature having an aspect ratio of greater than 30:1.

48. The lithographically-derived micro-machined metallic foil stack lamination mold of claim 40, wherein said mold defines at least one feature having an aspect ratio of greater than 40:1.

49. The lithographically-derived micro-machined metallic foil stack lamination mold of claim 40, wherein said mold defines at least one feature having an aspect ratio of greater than 50:1.

50. The lithographically-derived micro-machined metallic foil stack lamination mold of claim 40, wherein said mold defines at least one feature having an aspect ratio of greater than 75:1.

51. The lithographically-derived micro-machined metallic foil stack lamination mold of claim 40, wherein said mold defines at least one feature having an aspect ratio of greater than 100:1.

52. The lithographically-derived micro-machined metallic foil stack lamination mold of claim 40, wherein said mold defines at least one feature having an aspect ratio of greater than 150:1.

53. The lithographically-derived micro-machined metallic foil stack lamination mold of claim 40, wherein said mold defines at least one feature having an aspect ratio of greater than 200:1.

54. The lithographically-derived micro-machined metallic foil stack lamination mold of claim 40, wherein said mold defines at least one feature having an aspect ratio of greater than 250:1.

55. The lithographically-derived micro-machined metallic foil stack lamination mold of claim 40, wherein said mold defines at least one feature having an aspect ratio of greater than 300:1.

56. The lithographically-derived micro-machined metallic foil stack lamination mold of claim 40, wherein said mold defines at least one feature having an aspect ratio of greater than 400:1.

57. A metallic foil stack lamination mold that defines a protruding undercut and an aspect ratio of greater than 10:1.

58. A metallic foil stack lamination mold that defines a cavity having a protruding undercut and an aspect ratio of greater than 10:1.

59. A mold derived from a metallic foil stack lamination mold, said derived mold defining a cavity therein, a protruding undercut, and a feature having an aspect ratio greater than 10:1, said derived mold comprising a plurality of surfaces that define a periphery of a layer-less volume of said derived mold, a surface from said plurality of surfaces comprising a plurality of 3-dimensional micro-features that substantially spatially invertedly replicate a stack lamination mold surface formed by a stacked plurality of metallic foil layers comprised by said stack lamination mold.

60. A mold derived from a metallic foil stack lamination mold, said derived mold defining a protruding undercut and an aspect ratio of greater than 10:1, said derived mold comprising a plurality of surfaces that define a periphery of a layer-less volume of said derived mold, a surface from said plurality of surfaces comprising a plurality of 3-dimensional micro-features that substantially spatially invertedly replicate a stack lamination mold surface formed by a stacked plurality of metallic foil layers comprised by said stack lamination mold.

61. A mold derived from a metallic foil stack lamination mold, said derived mold defining a cavity having a protruding undercut and an aspect ratio of greater than 10:1, said derived mold comprising a plurality of surfaces that define a periphery of a layer-less volume of said derived mold, a surface from said plurality of surfaces comprising a plurality of 3-dimensional micro-features that substantially spatially invertedly replicate a stack lamination mold surface formed by a stacked plurality of metallic foil layers comprised by said stack lamination mold.

62. A method of forming a casting, comprising: filling a mold having a stacked plurality of lithographically-derived micro-machined layers with a first casting material to form a first cast product having an aspect ratio of greater than 10:1, the stacked plurality of lithographically-derived micro-machined layers defining a protruding undercut; and demolding the first cast product from the mold, such that the mold is not substantially damaged, said first cast product comprising a plurality of component surfaces that define a periphery of a layer-less volume of said first cast product, a component surface from said plurality of component surfaces comprising a plurality of 3-dimensional micro-features that substantially spatially invertedly replicate a mold surface formed by said stacked plurality of layers.

63. A method of forming a casting, comprising: filling a mold having a stacked plurality of lithographically-derived micro-machined layers with a first casting material to form a first cast product having an aspect ratio of greater than 10:1, the stacked plurality of lithographically-derived micro-machined layers defining a protruding undercut; and demolding the first cast product from the mold such that the mold is not substantially damaged, the first cast product reflecting the protruding undercut, said first cast product comprising a plurality of component surfaces that define a periphery of a layer-less volume of said first cast product, a component surface from said plurality of component surfaces comprising a plurality of 3-dimensional micro-features that substantially spatially invertedly replicate a mold surface formed by said stacked plurality of layers.

BRIEF DESCRIPTION OF THE DRAWINGS

The invention and its wide variety of potential embodiments will be more readily understood through the following detailed description, with reference to the accompanying drawings in which:

FIG. 1 is a flowchart of an exemplary embodiment of a method of the present invention.

FIG. 2 is a flow diagram of exemplary items fabricated using a method of the present invention.

FIG. 3 is a perspective view of an exemplary casting of the present invention that illustrates aspect ratio.

FIG. 4 is an assembly view of an exemplary assembly of the present invention.

FIG. 5A is a top view of an exemplary stack lamination mold of the present invention.

FIGS. 5B-5E are exemplary alternative cross-sectional views of an exemplary stack lamination mold of the present invention taken at section lines 5 - 5 of FIG. 5A.

FIG. 6 is an unassembled cross-sectional view of an alternative exemplary stack lamination mold taken of the present invention at section lines 5 - 5 of FIG. 5A.

FIG. 7 is a cross-sectional view of an exemplary alternative stack lamination mold of the present invention taken at section lines 5 - 5 of FIG. 5A.

FIG. 8 is a perspective view of an exemplary laminated mold.

FIG. 9 is a cross-section of an exemplary mold of the present invention taken along lines 9 - 9 of FIG. 8.

FIG. 10A is a top view an exemplary layer of the present invention having a redundant array of shapes.

FIG. 10B is a top view of an exemplary layer of the present invention having a non-redundant collection of shapes.

FIG. 11 is a top view of an exemplary stacked lamination mold of the present invention.

FIG. 12 is a cross-sectional view of an exemplary mold of the present invention taken at section lines 12 - 12 of FIG. 11.

FIG. 13 is a side view of an exemplary cast part of the present invention formed using the exemplary mold of FIG. 11.

FIG. 14 is a top view of an exemplary laminated mold of the present invention.

FIG. 15 is a cross-sectional view of an exemplary mold of the present invention taken at section lines 15 - 15 of FIG. 14.

FIG. 16 is a perspective view of an exemplary cast part of the present invention formed using the exemplary mold of FIG. 14.

FIG. 17 is a top view of an exemplary planar laminated mold of the present invention having an array of openings.

FIG. 18 is a top view of an exemplary flexible casting or mold insert of the present invention molded using the laminated mold of FIG. 17.

FIG. 19 is a top view of an exemplary mold fixture of the present invention

FIG. 20 is a top view of an exemplary planar laminated mold of the present invention.

FIG. 21 is a top view of an exemplary flexible casting or mold insert of the present invention molded using the laminated mold of FIG. 20.

FIG. 22 is a top view of an exemplary mold fixture of the present invention

FIG. 23 is a perspective view of an exemplary laminated mold of the present invention.

FIG. 24 is a close-up perspective view of an exemplary single cylindrical cavity of an exemplary mold of the present invention.

FIG. 25 is a perspective view of an exemplary cast part of the present invention.

FIG. 26 is a flowchart of an exemplary method of the present invention.

FIG. 27 is a perspective view of a plurality of exemplary layers of the present invention.

FIG. 28 is a perspective view of an exemplary laminating fixture of the present invention.

FIG. 29 is a top view of stack lamination mold of the present invention that defines an array of cavities.

FIG. 30 is a cross-section of a cavity of the present invention taken along section lines 30 - 30 of FIG. 29.

FIG. 31 is a perspective view of an exemplary single corrugated feedhorn of the present invention.

FIG. 32 is a side view of an exemplary casting fixture of the present invention.

FIG. 33 is a side view of an exemplary section of cylindrical tubing of the present invention that demonstrates the shape of an exemplary fluidic channel of the present invention.

FIG. 34 is a top view of an exemplary micro-machined layer of the present invention.

FIG. 35 is a cross-sectional view of a laminated slit of the present invention taken along section lines 35 - 35 of FIG. 34.

FIG. 36 is a side view of a portion of an exemplary flexible cavity insert of the present invention.

FIG. 37 is a top view of an exemplary base plate of the present invention.

FIG. 38 is a front view of a single exemplary flexible cavity insert assembly of the present invention.

FIG. 39 is a front view of flexible cavity inserts of the present invention.

FIG. 40 is a top view of a top plate of the present invention.

FIG. 41 is a flowchart of an exemplary embodiment of a method of the present invention.

FIG. 42A is a top view of an exemplary laminated stack of the present invention.

FIG. 42B is a cross-sectional view, taken at section lines 42 - 42 of FIG. 42A, of an exemplary laminated stack of the present invention.

FIG. 43 is side view of an exemplary mold and casting of the present invention.

FIG. 44 is a top view of an exemplary casting fixture of the present invention.

FIG. 45 is a front view of the exemplary casting fixture of FIG. 44.

FIG. 46 is a top view of a portion of an exemplary grid pattern of the present invention.

FIG. 47 is an assembly view of components of an exemplary pixelated gamma camera of the present invention.

FIG. 48A is a top view of an array of generic microdevices of the present invention.

FIG. 48B is a cross-sectional view of an exemplary microdevice of the present invention, taken at section lines 48 - 48 of FIG. 48A, in the open state.

FIG. 49 is a cross-sectional view of the exemplary microdevice of FIG. 48B, taken at section lines 48 - 48 of FIG. 48A, in the closed state.

FIG. 50 is a cross-sectional view of an alternative exemplary microdevice of the present invention, taken at section lines 48 - 48 of FIG. 48A, and shown with an inlet valve open.

FIG. 51 is a cross-sectional view of the alternative exemplary microdevice of

FIG. 50, taken at section lines 48 - 48 of FIG. 48A, and shown with an outlet valve open.

FIG. 52 is a top view of an exemplary microwell array of the present invention.

FIG. 53 is a cross-sectional view taken at lines 52 - 52 of FIG. 52 of an exemplary microwell of the present invention.

FIG. 54 is a cross-sectional view taken at lines 52 - 52 of FIG. 52 of an alternative exemplary microwell of the present invention.

FIG. 55 is a top view of exemplary microwell of the present invention.

FIG. 56 is a cross-sectional view of an exemplary microwell of the present invention, taken at lines 55 - 55 of FIG. 55.

DETAILED DESCRIPTION

Certain exemplary embodiments of the present invention can combine certain techniques of stack lamination with certain molding processes to manufacture a final product. As a result of the stack lamination techniques, precision micro-scale cavities of predetermined shapes can be engineered into the stack lamination. Rather than have the stack lamination embody the final product, however, the stack lamination can be used as an intermediate in a casting or molding process.

In certain exemplary embodiments of the present invention, the stack lamination (“laminated mold”) can be made up of layers comprising metallic, polymeric, and/or ceramic material. The mold can be a positive replication of a predetermined end product or a negative replication thereof. The mold can be filled with a first cast material and allowed to solidify. A first cast product can be demolded from the mold. The first cast material can comprise a flexible polymer such as silicone rubber.

Certain exemplary embodiments of a method of the present invention can further include surrounding the first cast product with a second casting material and allowing the second cast material to solidify. Still further, a second cast product can be demolded from the first cast product.

Some exemplary embodiments of the present invention can further include positioning an insert into the cavity prior to filling the mold with the first cast material, wherein the insert occupies only a portion of the space defined by the cavity. The second cast product can be nonplanar. The end product and/or the mold cavity can have an aspect ratio greater that 100:1. The end product can be attached to the substrate or it can be a free-standing structure.

FIG. 1 is a flowchart of an exemplary embodiment of a method 1000 of the present invention. At activity 1010 , a mold design is determined. At activity 1020 , the layers of the mold (“laminations”) are fabricated. At activity 1030 , the laminations are stacked and assembled into a mold (a derived mold could be produced at this point as shown in FIG. 1). At activity 1060 , a first casting is cast. At activity 1070 , the first casting is demolded.

FIG. 2 is a flow diagram of exemplary items fabricated during a method 2000 of the present invention. Layers 2010 can be stacked to form a mold or stacked lamination 2020 . A molding or casting material can be applied to mold 2020 to create a molding or casting 2030 , that can be demolded from mold 2020 .

FIG. 3 is a perspective view of an exemplary molding 3000 of the present invention that demonstrates a parameter referred to herein as “aspect ratio” which is described below. Molded block 3010 has numerous through-holes 3020 , each having a height H and a diameter or width W. For the purposes of this application, aspect ratio is defined as the ratio of height to width or H/W of a feature, and can apply to any “negative” structural feature, such as a space, channel, through-hole, cavity, etc., and can apply to a “positive” feature, such as a wall, projection, protrusion, etc., with the height of the feature measured along the Z-axis. Note that all features can be “bordered” by at least one “wall”. For a positive feature, the wall is part of the feature. For a negative feature, the wall at least partially defines the feature.

FIG. 3 also demonstrates the X-, Y-, and Z-directions or axes. For the purposes of this application, the dimensions measured in the X- and Y-directions define a top surface of a structure (such as a layer, a stack lamination mold, or negative and/or positive replications thereof) when viewed from the top of the structure. The Z-direction is the third dimension perpendicular to the X-Y plane, and corresponds to the line of sight when viewing a point on a top surface of a structure from directly above that point.

Certain embodiments of a method of the present invention can control aspect ratios for some or all features in a laminated mold, derived mold, and/or cast item (casting). The ability to attain relatively high aspect ratios can be affected by a feature's geometric shape, size, material, and/or proximity to another feature. This ability can be enhanced using certain embodiments of the present invention. For example, through-features of a mold, derived mold, and/or final part, having a width or diameter of approximately 5 microns, can have a dimension along the Z axis (height) of approximately 100 microns, or approximately 500 microns, or any value in the range there between (implying an aspect ratio of approximately 20:1, 100:1, or any value in the range therebetween, including, for example:

20:1 to 30:1, 20:1 to 40:1, 20:1 to 50:1, 20:1 to 60:1, 20:1 to 70:1, 20:1 to 80:1, 20:1 to 90:1, 20:1 to 100:1,

30:1 to 40:1, 30:1 to 50:1, 30:1 to 60:1, 30:1 to 70:1, 30:1 to 80:1, 30:1 to 90:1, 30:1 to 100:1,

40:1 to 50:1, 40:1 to 60:1, 40:1 to 70:1, 40:1 to 80:1, 40:1 to 90:1, 40:1 to 100:1,

50:1 to 60:1, 50:1 to 70:1, 50:1 to 80:1, 50:1 to 90:1, 50:1 to 100:1,

60:1 to 70:1, 60:1 to 80:1, 60:1 to 90:1, 60:1 to 100:1,

70:1 to 80:1, 70:1 to 90:1, 70:1 to 100:1,

80:1 to 90:1, 80:1 to 100:1, etc).

As another example, a through slit having a width of approximately 20 microns can have a height of approximately 800 microns, or approximately 1600 microns, or any value in the range therebetween (implying an aspect ratio of approximately 40:1, 80:1, or any value in the range therebetween, including, for example:

40:1 to 50:1, 40:1 to 60:1, 40:1 to 70:1, 40:1 to 80:1,

50:1 to 60:1, 50:1 to 70:1, 50:1 to 80:1,

60:1 to 70:1, 60:1 to 80:1,

70:1 to 80:1, etc).

As yet another example, the same approximately 20 micron slit can be separated by an approximately 15 micron wide wall in an array, where the wall can have a dimension along the Z axis (height) of approximately 800 microns, or approximately 1600 microns, or any value in the range therebetween (implying an aspect ratio of approximately 53:1, 114:1, or any value in the range therebetween, including, for example:

53:1 to 60:1, 53:1 to 70:1, 53:1 to 80:1, 53:1 to 90:1, 53:1 to 100:1, 53:1 to 110:1, 53:1 to 114:1,

60:1 to 70:1, 60:1 to 80:1, 60:1 to 90:1, 60:1 to 100:1, 60:1 to 110:1, 60:1 to 114:1,

70:1 to 80:1, 70:1 to 90:1, 70:1 to 100:1, 70:1 to 110:1, 70:1 to 114:1,

80:1 to 90:1, 80:1 to 100:1, 90:1 to 110:1, 90:1 to 114:1,

90:1 to 100:1, 90:1 to 110:1, 90:1 to 114:1,

100:1 to 110:1, 100:1 to 114:1, etc.).

Still another example is an array of square-shaped openings having sides that are approximately 0.850 millimeters wide, each opening separated by approximately 0.150 millimeter walls, with a dimension along the Z axis of approximately 30 centimeters. In this example the approximately 0.850 square openings have an aspect ratio of approximately 353:1, and the approximately 0.150 walls have an aspect ratio of approximately 2000:1, with lesser aspect ratios possible. Thus, the aspect ratio of the openings can be approximately 10:1, or approximately 350:1, or any value in the range therebetween, including for example:

10:1 to 20:1, 10:1 to 30:1, 10:1 to40:1, 10:1 to 50:1, 10:1 to 60:1, 10:1 to 70:1, 10:1 to 80:1, 10:1 to 90:1, 10:1 to 100:1, 10:1 to 150:1, 10:1 to 200:1, 10:1 to 250:1, 10:1 to 300:1, 10:1 to 350:1,

20:1 to 30:1, 20:1 to 40:1, 20:1 to 50:1, 20:1 to 60:1, 20:1 to 70:1, 20:1 to 80:1, 20:1 to 90:1, 20:1 to 100:1, 20:1 to 150:1, 20:1 to 200:1, 20:1 to 250:1, 20:1 to 300:1, 20:1 to 350:1,

30:1 to 40:1, 30:1 to 50:1, 30:1 to 60:1, 30:1 to 70:1, 30:1 to 80:1,30:1 to 90:1, 30:1 to 100:1, 30:1 to 150:1, 30:1 to 200:1, 30:1 to 250:1, 30:1 to 300:1, 30:1 to 350:1,

40:1 to 50:1, 40:1 to 60:1, 40:1 to 70:1, 40:1 to 80:1,40:1 to 90:1,40:1 to 100:1, 40:1 to 150:1, 40:1 to 200:1, 40:1 to 250:1, 40:1 to 300:1, 40:1 to 350:1,

50:1 to 60:1, 50:1 to 70:1, 50:1 to 80:1, 50:1 to 90:1, 50:1 to 100:1, 50:1 to 150:1, 50:1 to 200:1, 50:1 to 250:1, 50:1 to 300:1, 50:1 to 350:1,

75:1 to 80:1, 75:1 to 90:1, 75:1 to 100:1, 75:1 to 150:1, 75:1 to 200:1, 75:1 to 250:1, 75:1 to 300:1, 75:1 to 350:1,

100:1 to 150:1, 100:1 to 200:1, 100:1 to 250:1, 100:1 to 300:1, 100:1 to 350:1,

150:1 to 200:1, 150:1 to 250:1, 150:1 to 300:1, 150:1 to 350:1,

200:1 to 250:1, 200:1 to 300:1, 200:1 to 350:1,

250:1 to 300:1, 250:1 to 350:1,

300:1 to 350:1, etc.

Moreover, the aspect ratio of the walls can be approximately 10:1, or approximately 2000:1, or any value in the range therebetween, including for example:

10:1 to 20:1, 10:1 to 30:1, 10:1 to 40:1, 10:1 to 50:1, 10:1 to 100:1, 10:1 to 10 200:1, 10:1 to 500:1, 10:1 to 1000:1, 10:1 to 2000:1,

20:1 to 30:1, 20:1 to 40:1, 20:1 to 50:1, 20:1 to 100:1, 20:1 to 200:1, 20:1 to 500:1, 20:1 to 1000:1, 20:1 to 2000:1,

30:1 to 40:1, 30:1 to 50:1, 30:1 to 100:1, 30:1 to 200:1, 30:1 to 500:1, 30:1 to 1000:1, 30:1 to 2000:1,

40:1 to 50:1, 40:1 to 100:1, 40:1 to 200:1, 40:1 to 500:1, 40:1 to 1000:1, 40:1 to 2000:1,

50:1 to 100:1, 50:1 to 200:1, 50:1 to 500:1, 50:1 to 1000:1, 50:1 to2000:1,

100:1 to 200:1, 100:1 to 500:1, 100:1 to 1000:1, 100:1 to 2000:1,

200:1 to 500:1, 200:1 to 1000:1, 200:1 to 2000:1,

500:1 to 1000:1, 500:1 to 2000:1,

1000:1 to 2000:1, etc.

Another example of aspect ratio is the space between solid (positive) features of a mold, derived mold, and/or casting. For example, as viewed from the top, a casting can have two or more solid rectangles measuring approximately 50 microns wide by approximately 100 microns deep with an approximately 5 micron space therebetween (either width-wise or depth-wise). The rectangles can have a height of 100 microns, or 500 microns, or any value in the range therebetween (implying an aspect ratio of 20:1, or 100:1, or any value therebetween, including, for example:

20:1 to 30:1, 20:1 to 40:1, 20:1 to 50:1, 20:1 to 60:1, 20:1 to 70:1,20:1 to 80:1, 20:1 to 90:1, 20:1 to 100:1,

30:1 to 40:1, 30:1 to 50:1, 30:1 to 60:1, 30:1 to 70:1, 30:1 to 80:1,30:1 to 90:1, 30:1 to 100:1,

40:1 to 50:1, 40:1 to 60:1, 40:1 to 70:1, 40:1 to 80:1, 40:1 to 90:1, 40:1 to 100:1,

50:1 to 60:1, 50:1 to 70:1, 50:1 to 80:1, 50:1 to 90:1, 50:1 to 100:1,

60:1 to 70:1, 60:1 to 80:1, 60:1 to 90:1, 60:1 to 100:1,

70:1 to 80:1, 70:1 to 90:1, 70:1 to 100:1,

80:1 to 90:1, 80:1 to 100:1, etc).

In another example the same rectangles can have a space there between of approximately 20 microns, and the rectangles can have dimensions along the Z axis of approximately 800 microns, or approximately 5000 microns, or any value therebetween (implying an aspect ratio of approximately 40:1, or 250:1, or any value therebetween, including, for example:

40:1 to 50:1, 40:1 to 75:1, 40:1 to 100:1, 40:1 to 150:1, 40:1 to 200:1, 40:1 to 15 250:1,

75:1 to 100:1, 75:1 to 150:1, 75:1 to 200:1, 75:1 to 250:1,

100:1 to 150:1, 100:1 to 200:1, 100:1 to 250:1,

150:1 to 200:1, 150:1 to 250:1,

200:1 to 250:1, etc).

FIG. 4 is an assembly view of an exemplary assembly 4000 of the present invention that includes mold 4010 and cast part 4020 formed from mold 4010 . Because certain exemplary embodiments of the present invention can utilize lithographically-derived micro-machining techniques (or in some cases, non-lithographically-derived micro-machining techniques, such as laser machining) combined with molding and/or casting, laminated molds can be conceived as negatives 4010 or positives 4020 of the desired end product. The terms “negative” or “positive” replications can be subjective terms assigned to different stages of reaching an end product. For certain embodiments, any intermediate or the end product can be considered a negative or positive replication depending on a subject's point of view. For the purpose of this application, a “positive” replication is an object (whether an intermediate or an end product) that geometrically resembles at least a portion of the spatial form of the end product. Conversely, a “negative” replication is a mold that geometrically defines at least a portion of the spatial form of the end product. The following parameters are described for the purpose of demonstrating some of the potential design parameters of certain embodiments of a method of the present invention.

Layer Thickness

One design parameter can be the thickness of the micro-machined layers of the stack lamination mold. According to certain exemplary embodiments of the present invention, to achieve high-aspect ratios, multiple micro-machined foils or layers can be stacked in succession and bonded together. In certain exemplary embodiments of the present invention, the layer thickness can have a dimensional role in creating the desired shape in the third dimension. FIG. 5A is a top view of an exemplary stack lamination mold 5000 . FIGS. 5B-5E are exemplary alternative cross-sectional views of exemplary stack lamination mold 5000 taken at section lines 5 - 5 of FIG. 5A. As shown in FIG. 5B and FIG. 5D, respectively, stacks 5010 and 5020 utilize relatively thick layers. As shown in FIG. 5C and FIG. 5E, respectively, stacks 5030 and 5040 utilize relatively thinner layers in succession to smooth out resolution along the z-axis. Specific layers can have multiple functions that can be achieved through their thickness or other incorporated features described herein.

Cross-sectional Shape of Layer

One design parameter can be the cross sectional shape of a given layer in the mold. Through the use of etching and/or deposition techniques, many cross sectional shapes can be obtained. FIG. 6 is an unassembled cross-sectional view of an alternative exemplary stack lamination mold 5000 taken at section lines 5 - 5 of FIG. 5A. Each of exemplary layers 6010 , 6020 , 6030 , and 6040 of FIG. 6 define an exemplary through-feature 6012 , 6022 , 6032 , 6042 , respectively, each having a different shape, orientation, and/or configuration. These through-features 6012 , 6022 , 6032 , 6042 are bordered by one or more “sidewalls” 6014 , 6024 , 6034 , and 6044 , respectively, as they are commonly referred to in the field of lithographic micro-machining.

Etching disciplines that can be utilized for a layer of the mold can be broadly categorized as isotropic (non-linear) or anisotropic (linear), depending on the shape of the remaining sidewalls. Isotropic often refers to those techniques that produce one or more radial or hour glassed shaped sidewalls, such as those shown in layer 6010 . Anisotropic techniques produce one or more sidewalls that are more vertically straight, such as those shown in layer 6020 .

Additionally, the shape of a feature that can be etched through a foil of the mold can be controlled by the depth of etching on each surface and/or the configuration of the photo-mask. In the case of photo-chemical-machining, a term such as 90/10 etching is typically used to describe the practice of etching 90% through the foil thickness, from one side of the foil, and finishing the etching through the remaining 10% from the other side, such as shown on layer 6030 . Other etch ratios can be obtained, such as 80/20, 70/30, and/or 65/35, etc., for various foils and/or various features on a given foil.

Also, the practice of displacing the positional alignment of features from the top mask to the bottom mask can be used to alter the sidewall conditions for a layer of the mold, such as shown in layer 6040 .

By using these and/or other specific conditions as design parameters, layers can be placed to contribute to the net shape of the 3-dimensional structure, and/or provide specific function to that region of the device. For example, an hourglass sidewall could be used as a fluid channel and/or to provide structural features to the device. FIG. 7 is a cross-sectional view of an alternative exemplary stack lamination mold taken at section line 5 - 5 of FIG. 5A. FIG. 7 shows a laminated mold 5000 having layers 7010 , 7020 , 7030 , 7040 that define cavity 7060 . To achieve this, layers 7010 , 7020 are etched anisotropically to have straight sidewalls, while layer 7030 is thicker than the other layers and is etched isotropically to form the complex shaped cross-section shown.

Cross-sectional Surface Condition of Layer

Another design parameter when creating advanced three-dimensional structures can be the cross-sectional surface condition of the layers used to create a laminated mold. As is the case with sidewall shape, surface condition can be used to provide additional function to a structure or a particular region of the structure. FIG. 8 is a perspective view of a generic laminated mold 8000 . FIG. 9 is a cross-section of mold 8000 taken at lines 9 - 9 of FIG. 8. Any sidewall surface, top or bottom surface can be created with one or more specific finish conditions on all layers or on selected layers, such as for example, forming a relatively rough surface on at least a portion of a sidewall 9100 of certain through-features 9200 of layer 9300 . As another example, chemical and/or ion etching can be used to produce very smooth, polished surfaces through the use of selected materials and/or processing techniques. Similarly, these etching methods can also be manipulated to produce very rough surfaces.

Secondary techniques, such as electroplating and/or passive chemical treatments can also be applied to micromachined surfaces (such as a layer of the mold) to alter the finish. Certain secondary techniques (for example, lapping or superfinishing) can also be applied to non-micromachined surfaces, such as the top or bottom surfaces of a layer. In any event, using standard profile measuring techniques, described as “roughness average” (R _a ) or “arithmetic average” (AA), the following approximate ranges for surface finish (or surface conditions) are attainable using micromachining and/or one or more secondary techniques according to certain embodiments of the present invention (units in microns):

50 to any of: 25, 12.5, 6.3, 3.2, 1.6, 0.80, 0.40, 0.20, 0.10, 0.050, 0.025,

25 to any of: 12.5, 6.3, 3.2, 1.6, 0.80, 0.40, 0.20, 0.10, 0.050, 0.025,

12.5 to any of: 6.3, 3.2, 1.6, 0.80, 0.40, 0.20, 0.10, 0.050, 0.025,

6.3 to any of: 3.2, 1.6, 0.80, 0.40, 0.20, 0.10, 0.050, 0.025,

3.2 to any of: 1.6, 0.80, 0.40, 0.20, 0.10, 0.050, 0.025,

1.6 to any of: 0.80, 0.40, 0.20, 0.10, 0.050, 0.025,

0.80 to any of: 0.40, 0.20, 0.10, 0.050, 0.025,

0.40 to any of: 0.20, 0.10, 0.050, 0.025,

0.20 to any of: 0.10, 0.050, 0.025,

0.10 to any of: 0.050, 0.025,

0.050 to any of: 0.025, etc.

Additional Layer Features

Certain exemplary embodiments of the present invention can include layer features that can be created through the use of lithographic etching and/or deposition.

These embodiments can include the size, shape, and/or positional orientation of features relative to the X- and/or Y-axes of a layer and/or their relationship to features on neighboring layers along the Z-axis of the assembled laminated mold. These parameters can define certain geometric aspects of the structure. For example, FIG. 10A is a top view of a layer 10010 having a pattern of repeating features (a redundant array of shapes), and FIG. 10B is a top view of a layer 10020 having a variety of differently shaped features (a non-redundant collection of shapes). Although not shown, a layer can have both redundant and non-redundant features. The terms “redundant” and/or “non-redundant” can refer to either positive or negative features.

Thus, these parameters also can define the shapes and/or spatial forms of features, the number of features in a given area, secondary structures and/or spaces incorporated on or around a feature, and/or the spaces between features. The control of spacing between features can provide additional functionality and, for instance, allow integration of devices with micro-electronics. For example, conductive micro features could be arrayed (redundantly or non-redundantly) to align accurately with application specific integrated circuits (ASIC) to control features. Also, features could be arrayed for applications where non-linear spacing between features could enhance device functionality. For example, filtration elements could be arrayed in such a way as to match the flow and pressure profile of a fluid passing over or through a filtration media The spacing of the filtration elements could be arrayed to compensate for the non-linear movement of the fluid.

Cavity Definition Using Lithography

A cavity formed in accordance with certain exemplary embodiments of the present invention can assume a shape and/or spatial form that includes one or more predetermined “protruding undercuts”. Imaginarily rotating the X-Y plane about its origin to any particular fixed orientation, a cavity is defined as having a “protruding undercut” when a first section of the cavity taken perpendicular to the Z-axis (i.e., parallel to the X-Y plane) has a predetermined dimension in the X- and/or Y-direction greater than the corresponding dimension in the X- and/or Y-direction of a second section of the cavity taken perpendicular to the Z-axis, the second section further along in the direction of eventual demolding of a cast part relative to the mold (assuming the demolding operation involves pulling the cast part free from the mold). That is, the X-dimension of the first section is intentionally greater than the X-dimension of the second section by a predetermined amount, or the Y-dimension of the first section is intentionally greater than the Y-dimension of the second section by a predetermined amount, or both. In still other words, for the purposes of this patent application, the term protruding undercut has a directional component to its definition.

FIG. 11 is a top view of an exemplary stacked laminated mold 11000 . FIG. 12 is a cross-sectional view of a mold 11000 taken at section lines 12 - 12 of FIG. 11, and showing the layers 12010 - 12060 of mold 11000 that cooperatively define a cavity having protruding undercuts 12022 and 12042 . Direction A is the relative direction in which a part cast using mold 11000 will be demolded, and/or pulled away, from mold 11000 . FIG. 12 also shows that certain layers 12020 , 12040 of mold 11000 have been formed by controlled depth etching. As shown in FIG. 12, mold 11000 defines an internal mold surface 12070 , which is defined in part by protruding undercuts 12022 and 12042 . FIG. 13 is a side view of a cast part 13000 formed using mold 11000 . As shown in FIG. 13, cast part 13000 defines an external part periphery or surface 13100 , which is defined in part by 3-dimensional micro-features 13400 and 13600 that substantially spatially invertedly replicate protruding undercuts 12022 and 12042 .

To make layers for certain embodiments of a laminated mold of the present invention, such as layers 2010 of FIG. 2, a photo-sensitive resist material coating (not shown) can be applied to one or more of the major surfaces (i.e., either of the relatively large planar “top” or “bottom” surfaces) of a micro-machining blank. After the blank has been provided with a photo-resist material coating on its surfaces, “mask tools” or “negatives” or “negative masks”, containing a negative image of the desired pattern of openings and registration features to be etched in the blank, can be applied in alignment with each other and in intimate contact with the surfaces of the blank (photo-resist materials are also available for positive patterns). The mask tools or negatives can be made from glass, which has a relatively low thermal expansion coefficient. Materials other than glass can be used provided that such materials transmit radiation such as ultraviolet light and have a reasonably low coefficient of thermal expansion, or are utilized in a carefully thermally-controlled environment. The mask tools can be configured to provide an opening of any desired shape and further configured to provide substantially any desired pattern of openings.

The resulting sandwich of two negative masks aligned in registration and flanking both surfaces of the blank then can be exposed to radiation, typically in the form of ultraviolet light projected on both surfaces through the negative masks, to expose the photo-resist coatings to the radiation. Typically, the photo-resist that is exposed to the ultraviolet light is sensitized while the photo-resist that is not exposed is not sensitized because the light is blocked by each negative masks' features. The negative masks then can be removed and a developer solution can be applied to the surfaces of the blank to develop the exposed (sensitized) photo-resist material.

Once the photo-resist is developed, the blanks can be micro-machined using one or more of the techniques described herein. For example, when using photo-chemical-machining, an etching solution can react with and remove the layer material not covered by the photo-resist to form the precision openings in the layer. Once etching or machining is complete, the remaining unsensitized photo-resist can be removed using a chemical stripping solution.

Sub-cavities on Layers

Cavities can include sub-cavities, which can be engineered and incorporated into the molding and casting scheme using several methods. FIG. 14 is a top view of a laminated mold 14000 . FIG. 15 is a cross-sectional view of mold 14000 taken at section lines 15 - 15 of FIG. 14, and showing the sub-cavities 15010 within layer 15030 of mold 14000 . Note that because layer 15030 is sandwiched between layers 15020 and 15040 , sub-cavities 15010 can be considered “sandwiched”, because sub-cavities are at least partially bounded by a ceiling layer (e.g., 15020 ) and a floor layer (e.g., 15040 ). Note that, although not shown, a sub-cavity can extend to one or more outer edges of its layer, thereby forming, for example, a sandwiched channel, vent, sprew, etc. FIG. 16 is a perspective view of cast part 16000 formed using mold 14000 , and having protrusions 16010 that reflectively (invertedly) replicate sandwiched sub-cavities 15010 .

Because cast part can very accurately reflect the geometries of sub-cavities, such sub-cavities can be used to produce secondary features that can be incorporated with a desired structure. Examples of secondary features include fluid channels passing through or between features, protrusions such as fixation members (similar to Velcro-type hooks), reservoirs, and/or abrasive surfaces. Moreover, a secondary feature can have a wall which can have predetermined surface finish, as described herein.

There are a number of methods for producing sub-cavities in a laminated mold. For example, in the field of photo-chemical-machining, the practice of partially etching features to a specified depth is commonly referred to as “controlled depth etching” or CDE. CDE features can be incorporated around the periphery of an etched feature, such as a through-diameter. Because the CDE feature is partially etched on, for example, the top surface of the layer, it can become a closed cavity when an additional layer is placed on top.

Another method could be to fully etch the sub-cavity feature through the thickness of the layer. A cavity then can be created when the etched-through feature is sandwiched between layers without the features, such as is shown in FIG. 15.

Combinations of micro-machining techniques can be used to create sub-cavities. For example, photo-chemical-machining (PCM) can be used to create the etched-through feature in the layer, while ion etching could be applied as a secondary process to produce the sub-cavities. By combined etching techniques, the sub-cavities can be etched with much finer detail than that of PCM.

Micro-Structures, Features, and Arrays on Non-Planar Surfaces

Certain exemplary embodiments of the present invention can allow the production of complex three-dimensional micro-devices on contoured surfaces through the use of a flexible cavity mold insert.

One activity of such a process can be the creation of a planar laminated mold (stack lamination), which can define the surface or 3-dimensional structures. A second mold (derived mold) can be produced from the lamination using a flexible molding material such as silicone RTV. The derived mold can be produced having a thin backing or membrane layer, which can act as a substrate for the 3-dimensional surface or features. The membrane then can be mechanically attached to the contoured surface of a mold insert, which can define the casting's final shape with the incorporated 3-dimensional features or surface.

As an example, FIG. 17 is a top view of a planar laminated mold 17010 having an array of openings 17020 . FIG. 18 is a top view of a flexible casting or mold insert 18010 molded using laminated mold 17010 . Flexible mold insert 18010 has an array of appendages 18020 corresponding to the array of openings 17020 , and a backing layer 18030 of a controlled predetermined thickness.

FIG. 19 is a top view of a mold fixture 19010 having an outer diameter 19020 and an inner diameter 19030 . Placed around a cylinder or mandrel 19040 within mold fixture 19010 is flexible mold insert 18010 , defining a pour region 19050 .

Upon filling pour region 19050 , a casting is formed that defines a cylindrical tube having a pattern of cavities accessible from its inner diameter and corresponding to and formed by the array of appendages 18020 of flexible mold insert 18010 .

As another example, FIG. 20 is a top view of a planar laminated mold 20010 having an array of openings 20020 . FIG. 21 is a top view of a flexible casting or mold insert 21010 molded using laminated mold 20010 . Flexible mold insert 21010 has an array of appendages 21020 corresponding to the array of openings 20020 , and a backing layer 21030 of a controlled predetermined thickness.

FIG. 22 is a top view of a mold fixture 22010 having an outer diameter 22020 and an inner diameter 22030 . Placed around the inside diameter 22030 within mold fixture 22010 is flexible mold insert 21010 , defining a pour region 22050 .

Upon filling pour region 22050 , a casting is formed that defines a cylindrical tube having a pattern of cavities accessible from its outer diameter and corresponding to and formed by the array of appendages 21020 of flexible mold insert 21010 .

Through these and related approaches, the 3-dimensional structure or surface can be built-up at the planar stage, and can be compensated for any distortions caused by forming the membrane to the contoured surface. The fabrication of the laminated mold can use specific or combined micro-machining techniques for producing the layers that define the aspect-ratio and 3-dimensional geometry. Micro-surfaces and/or structures can be transferred to many contours and/or shapes. For example, micro-patterns can be transferred to the inside and/or outside diameter of cylinders or tubes. Specific examples demonstrating the capabilities of this method are provided later in this document.

Cavity Inserts

The term mold insert is used herein to describe a micro-machined pattern that is used for molding and/or fabrication of a cast micro-device, part, and/or item. The laminated or derived mold described in this document also can be considered a mold insert. Cavity inserts are described here as a subset of a mold insert. Cavity inserts are objects and/or assemblies that can be placed within a cavity section of a mold but that do not take up the entire cavity space, and that provide further features to a 3-dimensional mold.

As an example, FIG. 23 is a perspective view of a laminated mold 23010 having an array of cylindrical cavities 23020 , each extending from top to bottom of mold 23010 . FIG. 24 is a close-up perspective view of a single cylindrical cavity 23020 of mold 23010 . Suspended and extending within cavity 23020 are a number of cavity inserts 23030 . FIG. 25 is a perspective view of a cast part 25010 having numerous cavities 25020 formed by cavity inserts 23030 .

A cavity insert can also be produced using certain embodiments of the present invention. This is further explained later in the section on non-planar molds. An insert can be a portion of a mold in the sense that the insert will be removed from the cast product to leave a space having a predetermined shape within the product. An insert alternatively can become part of a final molded product. For instance, if it is desirable to have a composite end product, then a process can be engineered to leave an insert in place in the final molded product.

As an example of a cavity insert, a 3-dimensional mold insert can be produced using one or more embodiments of the present invention, the insert having an array of cavities that are through-diameters. The cast part derived from this mold can reverse the cavities of the mold as solid diameters having the shape, size and height defined by the mold. To further enhance functionality, cavity inserts can be added to the mold before the final casting is produced. In this case, the cavity insert can be a wire formed in the shape of a spring. The spring can have the physical dimensions required to fit within a cavity opening of the mold, and can be held in position with a secondary fixture scheme. The spring-shaped cavity insert can be removed from the cast part after the final casting process is completed. Thus, the cavity section of the mold can define the solid shape of the casting while the cavity insert can form a channel through the solid body in the shape and width of the insert (the spring). The cavity can serve as, for example, a reservoir and/or a fluid flow restrictor.

The examples given above demonstrate the basic principle of a cavity insert. Additional design and fabrication advances can be realized by using this method to create cavity inserts. For example, photo-chemical-machining can be used to create a mold that has larger cavity openings, while reactive-ion-etching can be used to create finer features on a cavity insert.

Fabricating the Laminated Mold

Certain exemplary embodiments of the present invention can involve the fabrication of a laminated mold which is used directly and/or as an intermediate mold in one or more subsequent casting and/or molding processes.

FIG. 26 is a block diagram illustrating various devices formed during an exemplary method 26000 for fabricating a laminated mold having micro-machined layers that can be patterned and/or etched, and stacked to create a 3-dimensional mold. The laminated mold can be produced as a negative or positive replication of the desired finished casting. For the purpose of creating a laminated mold, any of three elements can be implemented:

• • 1) creating a lithographic mask 26010 defining the features of each unique layer,
  • 2) using lithographic micro-machining techniques and/or micro-machining techniques to produce patterned layers 26020 , and/or
  • 3) aligning, stacking, and/or laminating the patterned layers into a stack 26030 in order to achieve the desired 3-dimensional cavity shape, aspect ratios, and/or mold parameters desired for a laminated mold 26040 .
    Lithographic Techniques

Using lithography as a basis for layer fabrication, parts and/or features can be designed as diameters, squares, rectangles, hexagons, and/or any other shape and/or combination of shapes. The combinations of any number of shapes can result in non-redundant design arrays (i.e. patterns in which not all shapes, sizes, and/or spacings are identical, as shown in FIG. 10). Lithographic features can represent solid or through aspects of the final part. Such feature designs can be useful for fabricating micro-structures, surfaces, and/or any other structure that can employ a redundant and/or non-redundant design for certain micro-structural aspects. Large area, dense arrays can be produced through the lithographic process, thereby enabling creation of devices with sub-features or the production of multiple devices in a batch format.

Lithography can also allow the creation of very accurate feature tolerances since those features can be derived from a potentially high-resolution photographic mask.

The tolerance accuracy can include line-width resolution and/or positional accuracy of the plotted features over the desired area. In certain embodiments, such tolerance accuracy can enable micro-scale fabrication and/or accurate integration of created micro-mechanical devices with microelectronics.

Photographic masks can assist with achieving high accuracy when chemical or ion-etched, or deposition-processed layers are being used to form a laminated mold through stack lamination. Because dimensional changes can occur during the final casting process in a mold, compensation factors can be engineered at the photo-mask stage, which can be transferred into the mold design and fabrication. These compensation factors can help achieve needed accuracy and predictability throughout the molding and casting process.

Photographic masks can have a wide range of potential feature sizes and positional accuracies. For example, when using an IGI Maskwrite 800 photoplotter, an active plotting area of 22.8×31.5 inches, minimum feature size of 5 microns, and positional accuracy of +−1 micron within a 15×15 inch area is possible. Using higher resolution lithographic systems for mask generation, such as those employed for electron beam lithography, feature sizes as small as 0.25 microns are achievable, with positional tolerances similar to the Maskwrite plotter, within an area of 6×6 inches.

Layer Machining and Material Options

Another aspect to fabricating the laminated mold can be the particular technique or techniques used to machine or mill-out the features or patterns from the layer material. In certain embodiments, combining lithographic imaging and micro-machining techniques can improve the design and fabrication of high-aspect-ratio, 3-dimensional structures. Some of the micro machining techniques that can be used to fabricate layers for a laminated mold include photo-etching, laser machining, reactive ion etching, electroplating, vapor deposition, bulk micro-machining, surface micro-machining, and/or conventional machining.

In certain exemplary embodiments, a laminated mold need only embody the mechanical features (e.g., size, shape, thickness, etc.) of the final casting. That is, it does not have to embody the specific functional properties (i.e. density, conductivity) that are desired to fulfill the application of the final casting. This means that any suitable techniques or materials can be used to produce the layers of the mold.

Thus, there can be a wide variety of material and fabrication options, which can allow for a wide variety of engineered features of a layer, laminated mold, and/or derived mold. For instance, although photo-chemical machining can be limited to metallic foils, by using laser machining or reactive ion etching, the choice of materials can become greatly expanded. With regard to laser machining, Resonetics, Inc. of Nashua, N.H. commercially provides laser machining services and systems. For laser machining, a very wide range of materials can be processed using UV and infra-red laser sources. These materials include ceramics, metals, plastics, polymers, and/or inorganics. Laser micro-machining processes also can extend the limits of chemical machining with regards to feature size and/or accuracy. With little or no restriction on feature geometry, sizes on the order of 2 microns can be achievable using laser machining.

When a wide variety of materials are available for making the laminated mold, process-compatibility issues can be resolved when choosing the material from which to create the mold. An example of this would be to match the thermal properties of casting materials with those of the laminated mold, in instances where elevated temperatures are needed in the casting or molding process. Also the de-molding properties of the mold and/or casting material can be relevant to the survival of the mold. This, for example, might lead one to laser-machine the layers from a material such as Teflon, instead of a metal. The laser machining process could be compatible with the Teflon and the Teflon could have greater de-molding capabilities than a metallic stack lamination.

In certain exemplary embodiments of the present invention, only a single laminated stack is needed to produce molds or castings. Also, in certain exemplary embodiments of the present invention, molds and/or castings can be produced without the need for a clean-room processing environment.

For certain exemplary embodiments of the present invention, the ability to create a single laminated mold and then cast the final parts can allow for using much thinner foils or advanced etching methods for producing the individual layers. Since feature size can be limited by the thickness of each foil, using thinner foils can allow finer features to be etched.

Certain exemplary embodiments of the present invention can combine various micro-machining techniques to create layers that have very specific functional features that can be placed in predetermined locations along the Z-axis of the mold assembly. For example, photo-chemical-machining can be used to provide larger features and high resolution ion-etching for finer features.

Various methods, as described above, can be used to produce layers for a laminated mold. The following examples are given to demonstrate dimensional feature resolution, positional accuracy, and/or feature accuracy of the layers.

Ion etching: when using a Commonwealth Scientific Millitron 8000 etching system, for example, a uniform etch area of 18 inches by 18 inches is achievable. Feature widths from 0.5 microns and above are attainable, depending on the lithographic masks and imaging techniques used. A feature, for example a 5 micron wide slot, etched to a depth of 10 microns can be etched to a tolerance of +−1.25 microns in width, and +−0.1 microns in depth. The positional tolerance of features would be the same as those produced on the lithographic masks.

Photo-chemical-machining: when using an Attotech XL 547 etching system, for example, a uniform etch area of 20 inches by 25 inches is achievable. Etched through-feature widths from 20 microns and above are attainable, with solid features widths of 15 microns and above also being attainable. A feature, for example a 30 micron diameter etched through 25 microns of copper, can be etched to a tolerance of +−2.5 microns or 10% of the foil thickness. The positional tolerance of such features would be the same as those produced on the lithographic masks.

Laser micromachining: when using a PIVOTAL laser micromachining system, for example, a uniform machining area of 3 inches by 3 inches is achievable. Machined through-feature sizes from 5 microns and above are attainable. A feature, for example a 5 micron wide slit machined through 25 microns of stainless steel, can be machined to a tolerance of +−1 micron. Positional tolerance of +−3 microns is achievable over the 3 inch by 3 inch area.

Electro-forming: depending on the size limitations of the photographic masks used for this process, electro-forming over areas as large as 60 inches by 60 inches is attainable. Electro-formed layers having thickness of 2 microns to 100