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7407433 Pad characterization tool  
Tools and methods for in-situ characterizing of a surface of a polishing pad are described. A characterization tool is integrated with polishing tool so that the polishing pad can be monitored...
7377836 Versatile wafer refining  
Methods of refining using a plurality of refining elements are discussed. A refining apparatus having refining elements that can be smaller than the workpiece being refined are disclosed. New...
7244347 Method and system to provide electrical contacts for electrotreating processes  
Systems and methods to provide electrical contacts to a workpiece to facilitate electrotreating processes, including electroplating and electroetching processes are presented.
7239121 Quantative extraction of micro particles from metallic disk spacer rings  
Embodiments of the present invention include a method for quantitatively detecting embedded particles of a disk spacer ring comprising. The method includes dissolving a layer of a disk spacer ring...
7211186 Method and system to provide electrical contacts for electrotreating processes  
Systems and methods to provide electrical contacts to a workpiece to facilitate electrotreating processes, including electroplating and electroetching processes are presented.
7211178 Fixture for electro-chemical machining  
On a fixture for electro-chemical machining for the production of long, curved cavities ( 11 ) in a component ( 12 ), the working electrode ( 3 ) of the electro-chemical machining tool ( 1 ) is...
7067048 Method to improve the control of electro-polishing by use of a plating electrode an electrolyte bath  
A method and apparatus which uses a plating electrode in an electrolyte bath. The plating electrode works to purify an electrolyte polishing solution during the electro-polishing process....
7026255 Method and device for photo-electrochemically etching a semiconductor sample, especially gallium nitride  
In a method for photo-electrochemical etching of a semiconductor sample, the semiconductor sample is brought in contact with an electrolyte liquid. The contact area formed thereby is illuminated...
6866763 Method and system monitoring and controlling film thickness profile during plating and electroetching  
The present invention provides method of adjusting a thickness profile of a top metal layer of a workpiece using a processing solution. A thickness profile control member is included that has at...
6837983 Endpoint detection for electro chemical mechanical polishing and electropolishing processes  
Systems and methods for detecting the endpoint of a polishing step. In general, an electropolishing system is provided with a power supply configured to deliver a current through an electrolytic...
6808617 Electrolytic polishing method  
A polishing method and polishing apparatus able to easily flatten an initial unevenness with an excellent efficiency of removal of excess copper film and suppress damage to a lower interlayer...
6783658 Electropolishing method  
A target material is electropolished by applying a voltage between an anode electrode and a counter electrode while bringing the anode electrode into contact with the surface of the target...
6756307 Apparatus for electrically planarizing semiconductor wafers  
The present invention pertains to apparatus and methods for electroplanarization of metal surfaces having both recessed and raised features, over a large range of feature sizes. The invention...
6752916 Electrochemical planarization end point detection  
A method for determining an end point of a planarization process for removing metal from a surface of a substrate submerged in an electrolytic solution or slurry. A first electrode is provided...
6723223 Electrochemical machining method with optimal machining pulse duration  
For an electromechanical machining of a work piece there is an optimal pulse duration for the machining pulses corresponding to the maximum copying accuracy. Such an optimal pulse duration...
6632348 Wire etching device and method  
A device and method for etching a wire to manufacture it into a tip for a scanning probe microscope or the like. The wire etching device generates a voltage signal for determining the level of a...
6620307 Method for a removal of cathode depositions by means of bipolar pulses  
A method for on-line removal of cathode depositions during electrochemical process. The process control unit ( 30 ) is arranged to alternate the unipolar machining voltage pulses U 1 with the...
6565734 Electrochemical process using current density controlling techniques  
An electrochemical process using current density controlling techniques is disclosed. In the electrochemical process of this invention, a carbon cathode rod activated with a negative voltage and an...
6454930 Procedure and device for the three-dimensional processing of a work piece by means of electroerosive or electrochemical machining  
A procedure and a device for the electroerosive or electrochemical machining of bent surfaces of a work piece ( 2 ) by means of an electrode ( 1; 1′; 1 ″) which is generally independent of the...
6447668 Methods and apparatus for end-point detection  
An apparatus for detecting the end-point of an electropolishing process of a metal layer formed on a wafer includes an end-point detector. The end-point detector is disposed adjacent the nozzle...
6440295 Method for electropolishing metal on semiconductor devices  
An electropolishing apparatus for polishing a metal layer formed on a wafer ( 31 ) includes an electrolyte ( 34 ), a polishing receptacle ( 100 ), a wafer chuck ( 29 ), a fluid inlet ( 5, 7, 9 ),...
6440291 Controlled induction by use of power supply trigger in electrochemical processing  
Methods and apparatus are used for triggering and controlling an initial induction period in which a substrate is immersed in an electrochemical bath prior to actual electrochemical processing....
6428681 System and method for reversing electrolyte flow during an electropolishing operation  
A pipe electrochemical polishing system ( 10, 10 a ) for in place polishing of a pipe ( 28 (has provision for detecting the instant position of a cathode ( 14 ) within the pipe ( 28 ) such as cable...
6398942 Electrochemical machining process for fabrication of cylindrical microprobe  
Disclosed is an electrochemical machining process for fabrication of cylindrical microprobes, which is effected by the tool acting as the cathode against the workpiece acting as the anode, taking...
6398941 Method of shaping a workpiece using an electrochemical machining tool  
A method of shaping a tool comprises the steps of defining a shape of an article to be formed with the tool as a plurality of first elements; defining an initial shape of the tool as a plurality of...
6372110 Electrochemical processing of subjects flown through by an electrolyte  
The electrochemical processing of a component such as an injection nozzle, must be calibrated in order to compare the throughput of the nozzle to a standard nozzle. Both throughput rates are...
6355156 Method of monitoring electrochemical machining process and tool assembly therefor  
An electrochemical machining process is monitored by embedding an ultrasonic sensor in an electrochemical machining tool to provide a tool assembly, placing the tool assembly in a spatial...
6340424 Manufacture of complexly shaped articles using an automated design technique  
An integrated compressor disk and compressor blade (BLISK) having a specified shape is prepared by an electrochemical machining process having a cathode defined by a set of cathode shape...
6312584 Method and apparatus for electrochemically machining a workpiece  
An apparatus for electrochemically machining of a workpiece by means of an electrode has an actuator for setting a gap between the electrode and the workpiece. The apparatus further has a channel...
6251787 Elimination of photo-induced electrochemical dissolution in chemical mechanical polishing  
Eliminating exposure of PN junctions to light capable of invoking a photovoltaic effect and/or inhibiting the oxidation and reduction reactions induced by the photovoltaic effect prevents the...
6245213 Method for anisotropic etching of structures in conducting materials  
In a method for anisotropic etching of a structure in an electrically conductive substance to be etched, use is made of an etchant which in concentrated solution is usable for isotopic etching of...
6231748 Method of and arrangement for electrochemical machining  
A method of electrochemically machining an electrically conductive workpiece in an electrolyte by applying electrical pulses between the workpiece and an electrically conductive electrode, one or...
6103094 Method for controlling electrochemical drilling  
In the electrochemical drilling of a hole completely through a workpiece, the present invention proposes operating the power supply in a current regulating mode. Initially, a hollow cathode is...
6059954 Electrochemical machining method and electrochemical machining equipment  
An electrochemical machining method in which a work piece and a machining electrode are opposed to each other and dipped in an electrolyte solution, and a surface of the work piece is machined by...
5993636 Method of making a needle electrode  
A method of making a needle electrode is such that a neck portion is formed in a thin wire made of a tungsten single crystal and the thin wire is cut at the neck portion by feeding an electric...
5942100 Crystal etch monitor  
The present application describes apparatus and method for monitoring and controlling the etching of quartz crystals to a desired target frequency by means of monitoring the frequency of a monitor...
5938913 Process and device for electrolytic treatment of continuous running material  
Process for electrolytic treatment of continuous running material in which the material runs through an electrolytic liquid and electric potential is applied to the material. In order to guarantee...
5885434 Method and apparatus for performing fine working  
A method for performing fine working of a material by electrochemical reaction comprises a two-step scanning operation in which a surface topography of the material is obtained during a first scan...
5882491 Electrode for electrochemical machining, method of electrochemical machining with said electrode, a bearing and a method of determining a profile using said electrode  
The invention relates to an electrode for electrochemical machining. An electrode comprising a plurality of electrode segments separated by insulating material. As desired, different voltages are...
5863411 Method for forming a minute pattern in a metal workpiece  
A method for forming a minute pattern in a metal workpiece, comprising the steps of forming a mask pattern on the metal workpiece and electro-chemically etching the metal workpiece. The workpiece...
5833835 Method and apparatus for electrochemical machining by bipolar current pulses  
Method of electrochemically machining an electrically conductive workpiece (2) in an electrolyte by applying bipolar electric pulses between the workpiece (2) and an electrically conductive...
5820744 Electrochemical machining method and apparatus  
Electrochemical machining (ECM) techniques utilizing real-time parameter monitoring, alarms and feedback control for improved machining of a workpiece are disclosed. The ECM device utilizes one or...
5685971 Apparatus and method for forming a variable diameter hole in a conductive workpiece  
A method and apparatus for forming a passage with a variable diameter along its length in a conductive workpiece are disclosed. The workpiece is mounted in a fixture and an externally insulated...
5639343 Method of characterizing group III-V epitaxial semiconductor wafers incorporating an etch stop layer  
The present invention comprises a method of characterizing a group III-V epitaxial semiconductor wafer in a characterization profiling apparatus having an electrolytic cell. The wafer contains at...
5630932 Tip etching system and method for etching platinum-containing wire  
A tip and substrate preparation system for use with scanning probe microscopes (SPMs) includes a scanning tunneling microscope (STM) tip maker, STM tip coater, a substrate treatment method for...
5622636 Etch-ending point measuring method for wet-etch process  
A wet-etch method which determines a desired etch-ending point includes the steps of providing an etchant solution in a bath, perform a wet-etch process by dipping a material to be etched in the...
5578167 Substrate holder and method of use  
The etching of a thin substrate (23) is performed using a holder (10). The holder (10) has a base (11) that has a cavity (20). The cavity (20) is pressurized to compensate for the pressure and...
5507924 Method and apparatus for adjusting sectional area ratio of metal-covered electric wire  
Disclosed herein are methods of measuring, adjusting and uniformalizing a sectional area ratio of a metal-covered electric wire, a method of cleaning an electric wire, a method of manufacturing a...
5507923 Method and apparatus for electrolytic polishing of tubular products  
An apparatus is provided for electrolytically polishing the inside surface of tubular products such as rifled stock, or fiream or artillery barrels. The apparatus comprises a first and second...
5406318 Ink jet print head with electropolished diaphragm  
The present invention provides an ink jet print head having an improved driver design and capable of extended and continuous periods of operation with substantially reduced rectified...
Matches 1 - 50 out of 82 1 2 >