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7458469 Substrate transfer apparatus and method, and storage medium  
In a substrate transfer apparatus, an adaptor unit 25 includes a box-shaped main body 40 having three open sides; and a plurality of stage arms 41 disposed in the main body 40 , serving as...
7455180 Substrate storage container  
A substrate storage container includes a container body for accommodating and aligning semiconductor wafers, a door which opens and closes the front of the container body and a pair of valve units...
7445654 Method and apparatus for adsorbing molecules from an atmosphere inside an enclosure containing multiple data storage devices  
Disclosed is a method and apparatus for a storage system having an adsorbtive element capable of adsorbing gas home molecules from gas for the storage system. In one configuration the storage...
RE40513 Cushion system for wafer carriers  
In a preferred embodiment of the invention, a transport module suitable for 300 mm wafers has a cushioning system that attaches to the interior of an enclosure door. The system comprises a pair of...
7418982 Substrate carrier and facility interface and apparatus including same  
A carrier comprises an enclosure, a cabinet and at least one substrate holder. The enclosure comprises a door. The cabinet is coupled to the carrier. The cabinet comprises at least one valve and...
7410061 Thin plate supporting container  
A thin plate supporting container includes a container body for housing therein semiconductor wafers, a lid unit for closing the container body, and slotted plates for supporting the semiconductor...
7399657 Ball grid array packages with thermally conductive containers  
Ball grid array packages for semiconductor die include a thermally conductive container and a substrate that substantially enclose a semiconductor die. The die is positioned with respect to the...
7383955 Thin plate supporting container  
A thin plate supporting container includes a container body for housing therein semiconductor wafers, a lid unit for closing the container body, and slotted plates for supporting the semiconductor...
7370764 Transport module  
A front-opening wafer transport module has a container portion with transparent shell and a central support structure which includes a machine interface exposed at the bottom of the module and...
7357258 Thin-plate supporting container  
The attaching-and-detaching operation of a lid unit, and the operation of taking in and out semiconductor wafers stored in a container body are facilitated. Thin-plate supporting units for...
7357257 Thin plate supporting container  
A thin plate supporting container includes a container body for housing therein semiconductor wafers, a lid unit for closing the container body, and slotted plates for supporting the semiconductor...
7347329 Substrate carrier  
A carrier for transporting silicon semiconductor wafers during semiconductor wafer processing operations including an enclosure, a door and a flange structured to interface with a machine so that...
7335244 Air-purifying device for a front-opening unified pod  
An air-purifying device for a front-opening unified pod to purify the air in it is provided. The air in the front-opening unified pod 51 is sucked through one of its breathing holes 58 a and...
7334691 Glass substrate cassette  
A glass substrate cassette includes a bottom structure, a top structure, and a pair of side supports affixed to space the bottom structure and the top structure for forming an accommodation space...
7334690 Substrate supporting rod and substrate cassette using the same  
A substrate-supporting rod ( 4 ) includes a resin body ( 41 ) and a metal rod ( 43 ). The resin body ( 41 ) includes a body portion ( 411 ) being cylinder-shaped and having a first through hole (...
7325698 Wafer container door with particulate collecting structure  
A substrate container having an enclosure with an access opening for inserting and removing substrates into an interior of the enclosure and a door chassis that is configured to selectively enclose...
7322098 Method of simultaneous two-disk processing of single-sided magnetic recording disks  
Various methods and apparatus for simultaneously processing two single-sided hard memory disks is provided. Disks are positioned in pairs, with one surface of one disk positioned adjacent one...
7316315 Thin plate storage container and lid having at least one thin plate supporting member  
A wafer storage container has a container body and a lid. The container body has lid support inserts in a lid receptacle, and the lid has corner inserts for contact with the lid support inserts to...
7261207 Method for carrying a semiconductor device  
A method for carrying a semiconductor device includes: (a) providing semiconductor devices each having a main surface, a back surface, and a plurality of external terminals; (b) providing a tray...
7201276 Front opening substrate container with bottom plate  
A substrate container and a bottom plate are connected with a mechanism for adjusting the distance between the container and bottom plate, by, e.g., a threaded connection between two members of the...
7175026 Memory disk shipping container with improved contaminant control  
A container for disks has an improved latching mechanism. The container comprises a cassette with sidewalls with slots for holding disks in an axial arrangement, two opposite end walls each have a...
7168564 Composite substrate carrier  
A composite wafer carrier according to an embodiment of the present invention comprises an operative portion formed of a first thermoplastic material and a support portion formed of a second...
7168153 Method for manufacturing single-sided hard memory disks  
Various apparatus and methods are provided for positioning and handling single-sided hard memory disks. A disk carrier is provided with ribs formed on the inside surface of opposing side walls. The...
7160417 Cassette for a load-lock  
A cassette for holding substrate in a load-lock comprising an outer casing having a front surface with multiple slots and two sidewalls having holes at the bottom section thereof. Braces are set at...
7137546 Silicon tube formed of bonded staves  
Tubular silicon members advantageously formed by extrusion from a silicon melt or by fixing together silicon staves in a barrel shape. A silicon-based wafer support tower is particularly useful for...
7121414 Semiconductor cassette reducer  
A semiconductor cassette reducer has a first substantially U-shaped plate and a second substantially U-shaped plate. A number of wafer supports connect the first substantially U-shaped plate to the...
7108135 Workpiece container assembly and apparatus for opening/closing the same  
A workpiece container assembly includes a container, and a cover having a locking section that facilitates manipulation and gripping by an apparatus for opening and closing the workpiece container...
7102702 Liquid crystal panel carrier with plurality of cannelures inside a box and a plurality of separate attaching elements  
A panel carrier comprising a box and a plurality of attaching elements is provided. The interior lateral surfaces of the box have a plurality of cannelures. The ends of each attaching element are...
7100772 Wafer container with door actuated wafer restraint  
A container for holding a wafer includes an enclosure portion having a top, a bottom, a pair of opposing sides, a back and an opposing open front defined by a door frame. A door is sealingly...
7077270 Thin plate storage container with seal and cover fixing means  
A double-seal mechanism is provided on a cover member for sealing closed a container main body. The double-seal mechanism includes an inner seal piece that seals an interior of the container main...
7073999 Receiving container body for object to be processed  
The present invention includes: a box case having a size capable of containing an open type of cassette that can hold a plurality of first objects to be processed and capable of containing a...
7039499 Robotic storage buffer system for substrate carrier pods  
A storage/buffering system for the stocking and/or buffering of substrate and/or substrate carriers in a process environment includes a 6-axis robot. An end-effector is connected with the robot...
7017750 Thin plate storage container  
A wafer storage container has a container body and a lid. The container body has lid support inserts in a lid receptacle, and the lid has corner inserts for contact with the lid support inserts to...
7017749 Precision substrate storage container and retaining member therefor  
A presser member ( 1 ) of the present invention is formed of different materials for the contacting part ( 5 ) to press-hold the precision substrates ( 15 ) and for the parts other than the...
6994217 Shipper with tooth design for improved loading  
A shipper for memory disks comprises a cassette having an open top and an open bottom, a top cover to cover the open top, and a bottom cover to cover the bottom. The body portion has opposing side...
6976585 Wafer carrier with ultraphobic surfaces  
A carrier with ultraphobic surfaces for promoting more effective cleaning and drying of the carrier. In the invention, entire surfaces or portions of surfaces of a carrier are made ultraphobic. The...
6955382 Wafer carrier door and latching mechanism with c-shaped cam follower  
A wafer container, and methods of constructing a wafer container. The wafer container has an enclosure portion with at least a top, a bottom, a pair of opposing sides, a back, an open front, and a...
6951284 Wafer carrier with wafer retaining system  
In a preferred embodiment of the invention, a wafer retaining arrangement is incorporated into a transport module suitable for 300 mm wafers. The wafer retaining arrangement attaches to an interior...
6945405 Transport module with latching door  
A wafer container has an open front defined by a frame for receiving a door. The frame has slots on opposite sides. The door utilizes two latching linkages that extend, lift, lower and retract two...
6939132 Semiconductor workpiece apparatus  
Various embodiments of an apparatus for holding and processing semiconductor workpieces are provided. In one aspect, an apparatus is provided that includes a first base, a second base and three...
6938774 Tray carrier with ultraphobic surfaces  
A tray carrier with ultraphobic surfaces for promoting more effective cleaning and drying of the tray carrier. In the invention, entire surfaces or portions of surfaces of a tray carrier are made...
6926029 Wafer container  
A container for storing substrates capable of shortening the cycle time of the production, improving the production efficiency and reducing the production cost is provided. The container for...
6923325 Horizontal cassette  
A cassette, particularly suitable for storing film frames, in a preferred embodiment utilizes an integral shell portion with a plurality of shelves to support a plurality of axially aligned...
6905731 Wafer container and dusting prevention method thereof and method for containing wafer  
There are provided a dust generation preventing structure of a wafer storage case and a process for preventing dust generation thereof, wherein dust generation is effectively prevented by blocking...
6902063 Latching mechanism for locking/unlocking the door of a wafer container  
A wafer container having a latching mechanism utilized to lock the door of the wafer container in an airtight status. The latching mechanism comprises a cam rotated to move a link and a locking...
6902059 Disk carrier  
The disk carrier is used to house and secure a plurality of disks and comprises a disk cassette having an open top, an open bottom, and end wall ingresses; a top cover; and a bottom cover. The top...
6883539 Wafer container  
A container for storing substrates capable of shortening the cycle time of the production, improving the production efficiency and reducing the production cost is provided. The container for...
6874638 Wafer cassette  
A wafer cassette comprises a case body and an adapter that supports substrates. There are adapters of various types corresponding to the size of the substrates to be supported. The case body and...
6871741 Composite substrate carrier  
A composite wafer carrier according to an embodiment of the present invention comprises an operative portion formed of a first thermoplastic material and a support portion formed of a second...
6845779 Edge gripping device for handling a set of semiconductor wafers in an immersion processing system  
A microelectronic substrate handling device comprising first and second support structures spaced from each other, the first support structure having a series of upper teeth defining a series of...
Matches 1 - 50 out of 230 1 2 3 4 5 >