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7458469 |
Substrate transfer apparatus and method, and storage medium
In a substrate transfer apparatus, an adaptor unit 25 includes a box-shaped main body 40 having three open sides; and a plurality of stage arms 41 disposed in the main body 40 , serving as...
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7455180 |
Substrate storage container
A substrate storage container includes a container body for accommodating and aligning semiconductor wafers, a door which opens and closes the front of the container body and a pair of valve units...
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7445654 |
Method and apparatus for adsorbing molecules from an atmosphere inside an enclosure containing multiple data storage devices
Disclosed is a method and apparatus for a storage system having an adsorbtive element capable of adsorbing gas home molecules from gas for the storage system. In one configuration the storage...
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RE40513 |
Cushion system for wafer carriers
In a preferred embodiment of the invention, a transport module suitable for 300 mm wafers has a cushioning system that attaches to the interior of an enclosure door. The system comprises a pair of...
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7418982 |
Substrate carrier and facility interface and apparatus including same
A carrier comprises an enclosure, a cabinet and at least one substrate holder. The enclosure comprises a door. The cabinet is coupled to the carrier. The cabinet comprises at least one valve and...
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7410061 |
Thin plate supporting container
A thin plate supporting container includes a container body for housing therein semiconductor wafers, a lid unit for closing the container body, and slotted plates for supporting the semiconductor...
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7399657 |
Ball grid array packages with thermally conductive containers
Ball grid array packages for semiconductor die include a thermally conductive container and a substrate that substantially enclose a semiconductor die. The die is positioned with respect to the...
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7383955 |
Thin plate supporting container
A thin plate supporting container includes a container body for housing therein semiconductor wafers, a lid unit for closing the container body, and slotted plates for supporting the semiconductor...
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7370764 |
Transport module
A front-opening wafer transport module has a container portion with transparent shell and a central support structure which includes a machine interface exposed at the bottom of the module and...
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7357258 |
Thin-plate supporting container
The attaching-and-detaching operation of a lid unit, and the operation of taking in and out semiconductor wafers stored in a container body are facilitated. Thin-plate supporting units for...
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7357257 |
Thin plate supporting container
A thin plate supporting container includes a container body for housing therein semiconductor wafers, a lid unit for closing the container body, and slotted plates for supporting the semiconductor...
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7347329 |
Substrate carrier
A carrier for transporting silicon semiconductor wafers during semiconductor wafer processing operations including an enclosure, a door and a flange structured to interface with a machine so that...
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7335244 |
Air-purifying device for a front-opening unified pod
An air-purifying device for a front-opening unified pod to purify the air in it is provided. The air in the front-opening unified pod 51 is sucked through one of its breathing holes 58 a and...
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7334691 |
Glass substrate cassette
A glass substrate cassette includes a bottom structure, a top structure, and a pair of side supports affixed to space the bottom structure and the top structure for forming an accommodation space...
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7334690 |
Substrate supporting rod and substrate cassette using the same
A substrate-supporting rod ( 4 ) includes a resin body ( 41 ) and a metal rod ( 43 ). The resin body ( 41 ) includes a body portion ( 411 ) being cylinder-shaped and having a first through hole (...
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7325698 |
Wafer container door with particulate collecting structure
A substrate container having an enclosure with an access opening for inserting and removing substrates into an interior of the enclosure and a door chassis that is configured to selectively enclose...
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7322098 |
Method of simultaneous two-disk processing of single-sided magnetic recording disks
Various methods and apparatus for simultaneously processing two single-sided hard memory disks is provided. Disks are positioned in pairs, with one surface of one disk positioned adjacent one...
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7316315 |
Thin plate storage container and lid having at least one thin plate supporting member
A wafer storage container has a container body and a lid. The container body has lid support inserts in a lid receptacle, and the lid has corner inserts for contact with the lid support inserts to...
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7261207 |
Method for carrying a semiconductor device
A method for carrying a semiconductor device includes: (a) providing semiconductor devices each having a main surface, a back surface, and a plurality of external terminals; (b) providing a tray...
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7201276 |
Front opening substrate container with bottom plate
A substrate container and a bottom plate are connected with a mechanism for adjusting the distance between the container and bottom plate, by, e.g., a threaded connection between two members of the...
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7175026 |
Memory disk shipping container with improved contaminant control
A container for disks has an improved latching mechanism. The container comprises a cassette with sidewalls with slots for holding disks in an axial arrangement, two opposite end walls each have a...
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7168564 |
Composite substrate carrier
A composite wafer carrier according to an embodiment of the present invention comprises an operative portion formed of a first thermoplastic material and a support portion formed of a second...
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7168153 |
Method for manufacturing single-sided hard memory disks
Various apparatus and methods are provided for positioning and handling single-sided hard memory disks. A disk carrier is provided with ribs formed on the inside surface of opposing side walls. The...
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7160417 |
Cassette for a load-lock
A cassette for holding substrate in a load-lock comprising an outer casing having a front surface with multiple slots and two sidewalls having holes at the bottom section thereof. Braces are set at...
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7137546 |
Silicon tube formed of bonded staves
Tubular silicon members advantageously formed by extrusion from a silicon melt or by fixing together silicon staves in a barrel shape. A silicon-based wafer support tower is particularly useful for...
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7121414 |
Semiconductor cassette reducer
A semiconductor cassette reducer has a first substantially U-shaped plate and a second substantially U-shaped plate. A number of wafer supports connect the first substantially U-shaped plate to the...
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7108135 |
Workpiece container assembly and apparatus for opening/closing the same
A workpiece container assembly includes a container, and a cover having a locking section that facilitates manipulation and gripping by an apparatus for opening and closing the workpiece container...
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7102702 |
Liquid crystal panel carrier with plurality of cannelures inside a box and a plurality of separate attaching elements
A panel carrier comprising a box and a plurality of attaching elements is provided. The interior lateral surfaces of the box have a plurality of cannelures. The ends of each attaching element are...
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7100772 |
Wafer container with door actuated wafer restraint
A container for holding a wafer includes an enclosure portion having a top, a bottom, a pair of opposing sides, a back and an opposing open front defined by a door frame. A door is sealingly...
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7077270 |
Thin plate storage container with seal and cover fixing means
A double-seal mechanism is provided on a cover member for sealing closed a container main body. The double-seal mechanism includes an inner seal piece that seals an interior of the container main...
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7073999 |
Receiving container body for object to be processed
The present invention includes: a box case having a size capable of containing an open type of cassette that can hold a plurality of first objects to be processed and capable of containing a...
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7039499 |
Robotic storage buffer system for substrate carrier pods
A storage/buffering system for the stocking and/or buffering of substrate and/or substrate carriers in a process environment includes a 6-axis robot. An end-effector is connected with the robot...
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7017750 |
Thin plate storage container
A wafer storage container has a container body and a lid. The container body has lid support inserts in a lid receptacle, and the lid has corner inserts for contact with the lid support inserts to...
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7017749 |
Precision substrate storage container and retaining member therefor
A presser member ( 1 ) of the present invention is formed of different materials for the contacting part ( 5 ) to press-hold the precision substrates ( 15 ) and for the parts other than the...
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6994217 |
Shipper with tooth design for improved loading
A shipper for memory disks comprises a cassette having an open top and an open bottom, a top cover to cover the open top, and a bottom cover to cover the bottom. The body portion has opposing side...
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6976585 |
Wafer carrier with ultraphobic surfaces
A carrier with ultraphobic surfaces for promoting more effective cleaning and drying of the carrier. In the invention, entire surfaces or portions of surfaces of a carrier are made ultraphobic. The...
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6955382 |
Wafer carrier door and latching mechanism with c-shaped cam follower
A wafer container, and methods of constructing a wafer container. The wafer container has an enclosure portion with at least a top, a bottom, a pair of opposing sides, a back, an open front, and a...
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6951284 |
Wafer carrier with wafer retaining system
In a preferred embodiment of the invention, a wafer retaining arrangement is incorporated into a transport module suitable for 300 mm wafers. The wafer retaining arrangement attaches to an interior...
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6945405 |
Transport module with latching door
A wafer container has an open front defined by a frame for receiving a door. The frame has slots on opposite sides. The door utilizes two latching linkages that extend, lift, lower and retract two...
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6939132 |
Semiconductor workpiece apparatus
Various embodiments of an apparatus for holding and processing semiconductor workpieces are provided. In one aspect, an apparatus is provided that includes a first base, a second base and three...
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6938774 |
Tray carrier with ultraphobic surfaces
A tray carrier with ultraphobic surfaces for promoting more effective cleaning and drying of the tray carrier. In the invention, entire surfaces or portions of surfaces of a tray carrier are made...
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6926029 |
Wafer container
A container for storing substrates capable of shortening the cycle time of the production, improving the production efficiency and reducing the production cost is provided. The container for...
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6923325 |
Horizontal cassette
A cassette, particularly suitable for storing film frames, in a preferred embodiment utilizes an integral shell portion with a plurality of shelves to support a plurality of axially aligned...
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6905731 |
Wafer container and dusting prevention method thereof and method for containing wafer
There are provided a dust generation preventing structure of a wafer storage case and a process for preventing dust generation thereof, wherein dust generation is effectively prevented by blocking...
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6902063 |
Latching mechanism for locking/unlocking the door of a wafer container
A wafer container having a latching mechanism utilized to lock the door of the wafer container in an airtight status. The latching mechanism comprises a cam rotated to move a link and a locking...
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6902059 |
Disk carrier
The disk carrier is used to house and secure a plurality of disks and comprises a disk cassette having an open top, an open bottom, and end wall ingresses; a top cover; and a bottom cover. The top...
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6883539 |
Wafer container
A container for storing substrates capable of shortening the cycle time of the production, improving the production efficiency and reducing the production cost is provided. The container for...
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6874638 |
Wafer cassette
A wafer cassette comprises a case body and an adapter that supports substrates. There are adapters of various types corresponding to the size of the substrates to be supported. The case body and...
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6871741 |
Composite substrate carrier
A composite wafer carrier according to an embodiment of the present invention comprises an operative portion formed of a first thermoplastic material and a support portion formed of a second...
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6845779 |
Edge gripping device for handling a set of semiconductor wafers in an immersion processing system
A microelectronic substrate handling device comprising first and second support structures spaced from each other, the first support structure having a series of upper teeth defining a series of...
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