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7473894 |
Apparatus and method for a scanning probe microscope
The invention relates to an apparatus and a method for a scanning probe microscope, comprising a measuring assembly which includes a lateral shifting unit to displace a probe in a plane, a vertical...
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7473887 |
Resonant scanning probe microscope
A scanning probe microscope detects or induces changes in a probe-sample interaction. In imaging mode, the probe 54 is brought into a contact distance of the sample 12 and the strength of the...
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7470901 |
Charged particle spectrometer and detector therefor
A charged particle (e.g. photoelectron) spectrometer is operable in a first mode to produce an energy spectrum relating to the composition of a sample being analysed, and in a second mode to...
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7468512 |
Computer program products for measuring critical dimensions of fine patterns using scanning electron microscope pictures and secondary electron signal profiles
A pattern is inspected by acquiring a scanning electron microscope picture of an inspection pattern, and acquiring a scanning electron microscope secondary electron signal profile of the inspection...
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7465923 |
Testing method for semiconductor device, testing apparatus therefor, and semiconductor device suitable for the test
The present invention relates to a method of testing, in the manufacturing process of an LSI (large scale integration) device, a result apparatus therefor, and a cross-sectional microstructure of...
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7465922 |
Accelerating electrostatic lens gun for high-speed electron beam inspection
One embodiment relates to an electron beam apparatus for inspecting or reviewing a manufactured substrate. The apparatus includes a cathode, an extraction electrode, a lens electrode, an anode,...
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7462842 |
Device, EUV lithographic device and method for preventing and cleaning contamination on optical elements
The invention relates to a method for preventing contamination on the surfaces of optical elements comprising a multi-layer system, during the exposure thereof to radiation at signal wave lengths...
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7462828 |
Inspection method and inspection system using charged particle beam
In an electric immersion lens having high resolution capability, secondary electrons generated from a specimen are accelerated to suppress the dependency of rotational action of the secondary...
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7461543 |
Overlay measurement methods with firat based probe microscope
A method, system and unit for determining alignment in a layered device such as a semiconductor device includes providing a first layer having detectable surface and subsurface material properties...
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7459683 |
Charged particle beam device with DF-STEM image valuation method
There is disclosed a charged particle beam device which judges whether or not an image based on a dark-field signal has an appropriate atomic number contrast. Input reference information, a...
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7459682 |
Spin-polarized electron source and spin-polarized scanning tunneling microscope
An exemplary spin-polarized electron source includes a cathode, and a one-dimensional nanostructure made of a compound (e.g., group III-V) semiconductor with local polarized gap states. The...
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7459681 |
Scanning electron microscope
An object of the invention is to reduce the beam drift in which the orbit of the charged particle beam is deflected by a potential gradient generated by a nonuniform sample surface potential on a...
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7459680 |
Method of analysis using energy loss spectrometer and transmission electron microscope equipped therewith
A method of analysis using an energy loss spectrometer and a transmission electron microscope equipped with the energy loss spectrometer. The spectrometer has a CCD camera for recording plural...
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7456413 |
Apparatus for evacuating a sample
The invention relates to an apparatus for evacuating samples. A sample 4 is hereby placed in a cavity 3 of a sheet 1 with a smooth surface 2 . A sole plate 5 Is placed upon this smooth...
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7456402 |
Detector optics for multiple electron beam test system
A detector optics system for collecting secondary electrons (SEs) and/or backscattered electrons (BSEs) in a multiple charged particle beam test system is disclosed. Aspects of the detector optics...
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7456400 |
Scanning probe microscope and scanning method
A scanning probe microscope has a probe needle and a control section that controls relative scanning movement between the probe needle and a surface of a sample in at least one direction parallel...
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7456399 |
Calibrating multiple photoelectron spectroscopy systems
A method comprising obtaining a first set of spectral data for a first sample film measured by a first system, extracting intensities for one or more elemental species associated with the first...
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7453074 |
Ion implanter with ionization chamber electrode design
An ion implanter includes an ion source for generating an ion beam moving along a beam line and a vacuum or implantation chamber wherein a workpiece, such as a silicon wafer is positioned to...
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7453063 |
Calibration substrate and method for calibrating a lithographic apparatus
A calibration substrate for use during calibration of a lithographic apparatus is disclosed. The calibration substrate includes a first substantially flat surface, a second substantially flat...
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7446324 |
Methods utilizing scanning probe microscope tips and products thereof or produced thereby
The invention provides a lithographic method referred to as “dip pen” nanolithography (DPN). DPN utilizes a scanning probe microscope (SPM) tip (e.g., an atomic force microscope (AFM) tip) as a...
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7446313 |
Scanning electron microscope
It is facilitated in a scanning electron microscope to save the labor of executing the reproduction test, conduct basic analysis on a problem caused in execution of the automatic observation...
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7446309 |
In-plane distribution measurement method
In plane distribution of a target object contained in a sample is measured. The sample dispersedly placed on a substrate is treated to promote ionization of the target object. Then, the mass and...
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7444857 |
Software synchronization of multiple scanning probes
A method and apparatus for scanning multiple scanning probe microscopes in close proximity, to scan overlapping scan areas at the same time while avoiding collision employs a control system...
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7442929 |
Scanning electron microscope
A scanning electron microscope for digitally processing an image signal to secure the largest focal depth and the best resolution in accordance with the magnification for observation is disclosed....
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7442926 |
Nano tip and fabrication method of the same
The present invention relates to a nano tip and a fabrication method of the nano tip that is generally usable in mechanical, physical, and electrical devices for detecting surface signals or...
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7442925 |
Working method using scanning probe
The present invention provides a working method using a scanning probe which can enhance a working speed and prolong a lifetime of the probe. The present invention provides the working method using...
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7442924 |
Repetitive circumferential milling for sample preparation
A method of sample extraction entails making multiple, overlapping cuts using a beam, such as a focused ion beam, to create a trench around a sample, and then undercutting the sample to free it....
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7442922 |
Method for locally highly resolved, mass-spectroscopic characterization of surfaces using scanning probe technology
The invention relates to a combined method in which a high-resolution image of a sample surface is recorded by means of scanning force microscopy and the locally high-resolution, chemical nature...
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7439502 |
Electron beam apparatus and device production method using the electron beam apparatus
The purpose of the invention is to provide an improved electron beam apparatus with improvements in throughput, accuracy, etc. One of the characterizing features of the electron beam apparatus of...
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7439501 |
Direct write nanolithography using heated tip
A device for sculpting a substrate includes a vertically displaceable probe having a nano-scale dimensioned probe tip. A displacement mechanism is configured to adjust a vertical displacement...
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7435973 |
Material processing system and method
A material processing system for processing a work piece is provided. The material processing is effected by supplying a reactive gas and energetic radiation for activation of the reactive gas to a...
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7435960 |
Charged particle beam apparatus
A charged particle beam apparatus obtains an image by detecting a generation signal inclusively indicative of secondary electrons generated from a specimen. The apparatus has an input unit for...
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7435959 |
Microstructured pattern inspection method
The edges of the reticle are detected with respect to the microstructured patterns exposed by the stepper, and the shapes of the microstructured patterns at the surface and at the bottom of the...
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7435958 |
Electron beam apparatus and method for production of its specimen chamber
A structure of an electron beam apparatus having shielding properties for shielding against an environmental magnetic field is provided. The electron beam apparatus comprises a mirror barrel for...
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7435957 |
Charged particle beam equipment and charged particle microscopy
On the basis of a displacement of the field of view before and after a deflection of a charged particle beam, extracted from a first specimen image, including a displacement of the field of view...
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7435955 |
Scanning probe microscope control system
A system for controlling the operation of a scanning probe microscope that greatly simplifies the microscope's operation is disclosed. The software design incorporates several advanced features...
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7435954 |
Electron microscope, methods to determine the contact point and the contact of the probe
An electron microscope suitable for observing at least one sample is provided. The sample has at least one testing area, and a material of the sample on the testing area is semiconductive or...
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7433751 |
***WITHDRAWN PATENT AS PER THE LATEST USPTO WITHDRAWN LIST***
Sorting a group of integrated circuit devices for those devices requiring special testing
A method for sorting integrated circuit (IC) devices of the type having a fuse identification (ID) into those devices requiring enhanced reliability testing and those requiring standard testing...
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7432511 |
Method of operating liquid in the vacuum or low-pressure environment and observing the operation and device for the operation and observation
A method of operating liquid in a vacuum or low-pressure environment and observing the operation and a device for the operation and the observation respectively, including the steps of preparing a...
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7432503 |
Scanning electron microscope and method for detecting an image using the same
In the present invention, in order to realize both a reduction of an image detecting time and high quality image detection in a scanning electron microscope for measurement, inspection, defect...
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7432502 |
Information acquisition method and apparatus for information acquisition
The invention is to provide a method and an apparatus for observing a substance having a stable morphology in a liquid medium such as water. The method comprises the steps of obtaining a...
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7430484 |
Signal processing method and apparatus for use in real-time subnanometer scale position measurements with the aid of probing sensors and beams scanning periodically undulating surfaces such as gratings and diffraction patterns generated thereby, and the like
An improved signal processing method and apparatus are presented for use in real-time sub-nanometer scale position measurements with the aid of probing sensors and/or beams scanning periodically...
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7429733 |
Method and sample for radiation microscopy including a particle beam channel formed in the sample source
A method and sample for radiation microscopy include a sample source that includes an area of interest, an outer side of a sample formed in the sample source adjacent to the area of interest, an...
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7429732 |
Scanning probe microscopy method and apparatus utilizing sample pitch
The preferred embodiments are directed to a method and apparatus of operating a scanning probe microscope (SPM) to perform sample measurements using a survey scan that is less than five lines, and...
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7427757 |
Large collection angle x-ray monochromators for electron probe microanalysis
X-ray monochromators and electron probe micro-analysis (EPMA) systems using such monochromators are disclosed. A turretless x-ray monochromator may have a cassette of reflectors instead of a...
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7427756 |
Method of precision measurements of sizes and line width roughness of small objects in accordance with their images obtained in scanning electron microscope
A novel method of precision measurements of sizes and line width roughness of small objects in accordance with their images obtained in scanning electron microscope, which is improvement of the...
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7427755 |
Integrated electron beam tip and sample heating device for a scanning tunneling microscope
An electron beam heating device with the temperature up to 2200 K is provided for heating a sample and a tip for a scanning tunneling microscope (STM). The electron beam heating device includes a...
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7427754 |
Telegraph signal microscopy device and method
A microscope device includes a probe having a dielectric material with a first side and a second side. First and second electrodes are disposed on the first side of the dielectric material. A...
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7427753 |
Method of cross-section milling with focused ion beam (FIB) device
A method of milling a cross section of a wafer and a milling device. The method includes a coarse scanning of at least two milling frames and a fine scanning of at least one milling frame. The...
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7425712 |
Method of operating liquid in the vacuum or low-pressure environment and observing the operation and device for the operation and observation
A method of operating liquid in a vacuum or low-pressure environment and observing the operation and a device for the operation and the observation respectively, including the steps of preparing a...
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