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Match Document Document Title
7473894 Apparatus and method for a scanning probe microscope  
The invention relates to an apparatus and a method for a scanning probe microscope, comprising a measuring assembly which includes a lateral shifting unit to displace a probe in a plane, a vertical...
7472585 Method for rapid seeks to the measurement surface for a scanning probe microscope  
In accordance with the invention, rapid surface seeks to the measurement surface by a scanning probe microscope are enabled by using an actuator coupled to a position sensor.
7470915 Detector system of secondary and backscattered electrons for a scanning electron microscope  
A system for detecting secondary and backscattered electrons in a scanning electron microscope includes a microporous plate ( 9 ) that is disposed between a lower scintillator ( 5 ) and an upper...
7470901 Charged particle spectrometer and detector therefor  
A charged particle (e.g. photoelectron) spectrometer is operable in a first mode to produce an energy spectrum relating to the composition of a sample being analysed, and in a second mode to...
7468512 Computer program products for measuring critical dimensions of fine patterns using scanning electron microscope pictures and secondary electron signal profiles  
A pattern is inspected by acquiring a scanning electron microscope picture of an inspection pattern, and acquiring a scanning electron microscope secondary electron signal profile of the inspection...
7465923 Testing method for semiconductor device, testing apparatus therefor, and semiconductor device suitable for the test  
The present invention relates to a method of testing, in the manufacturing process of an LSI (large scale integration) device, a result apparatus therefor, and a cross-sectional microstructure of...
7462842 Device, EUV lithographic device and method for preventing and cleaning contamination on optical elements  
The invention relates to a method for preventing contamination on the surfaces of optical elements comprising a multi-layer system, during the exposure thereof to radiation at signal wave lengths...
7462828 Inspection method and inspection system using charged particle beam  
In an electric immersion lens having high resolution capability, secondary electrons generated from a specimen are accelerated to suppress the dependency of rotational action of the secondary...
7459704 Ion source configuration for production of ionized clusters, ionized molecules and ionized mono-atoms  
Ion sources and methods for generating molecular ions in a cold operating mode and for generating atomic ions in a hot operating mode are provided. In some embodiments, first and second electron...
7459699 Method of determining processing position in charged particle beam apparatus, and infrared microscope used in the method  
A laser mark which will be the positioning mark for a secondary charged particle image in the charged particle beam apparatus is applied by moving the sample processing/observation area in the...
7459683 Charged particle beam device with DF-STEM image valuation method  
There is disclosed a charged particle beam device which judges whether or not an image based on a dark-field signal has an appropriate atomic number contrast. Input reference information, a...
7459682 Spin-polarized electron source and spin-polarized scanning tunneling microscope  
An exemplary spin-polarized electron source includes a cathode, and a one-dimensional nanostructure made of a compound (e.g., group III-V) semiconductor with local polarized gap states. The...
7456413 Apparatus for evacuating a sample  
The invention relates to an apparatus for evacuating samples. A sample 4 is hereby placed in a cavity 3 of a sheet 1 with a smooth surface 2 . A sole plate 5 Is placed upon this smooth...
7456401 Projection electron microscope, electron microscope, specimen surface observing method and micro device producing method  
The illuminating beam 4 emitted from the cathode 1 is incident on a deflector 3 . In a state in which a voltage is applied to the deflector 3 , the optical path of the illuminating beam 4 ...
7456400 Scanning probe microscope and scanning method  
A scanning probe microscope has a probe needle and a control section that controls relative scanning movement between the probe needle and a surface of a sample in at least one direction parallel...
7456399 Calibrating multiple photoelectron spectroscopy systems  
A method comprising obtaining a first set of spectral data for a first sample film measured by a first system, extracting intensities for one or more elemental species associated with the first...
7453073 Method and equipment for specimen preparation  
Method and equipment permitting one to easily prepare a good thin-film specimen adapted for observation are offered. The equipment has an ion gun tilted left and right repeatedly to etch a specimen...
7453063 Calibration substrate and method for calibrating a lithographic apparatus  
A calibration substrate for use during calibration of a lithographic apparatus is disclosed. The calibration substrate includes a first substantially flat surface, a second substantially flat...
7449699 Method and apparatus for creating a topography at a surface  
Methods and apparatus whereby an optical interferometer is utilized to monitor and provide feedback control to an integrated energetic particle column, to create desired topographies, including the...
7449690 Inspection method and inspection apparatus using charged particle beam  
To establish a technique that enables sorting of the elevation and azimuth angle in the direction of emitting secondary electrons and obtaining images with emphasized contrast, in order to perform...
7449688 Deconvolving far-field images using scanned probe data  
A method for deconvolving far-field optical images beyond the diffraction limit includes the use of near-field optical and other scanned probe imaging data to provide powerful and new constraints...
7446313 Scanning electron microscope  
It is facilitated in a scanning electron microscope to save the labor of executing the reproduction test, conduct basic analysis on a problem caused in execution of the automatic observation...
7446309 In-plane distribution measurement method  
In plane distribution of a target object contained in a sample is measured. The sample dispersedly placed on a substrate is treated to promote ionization of the target object. Then, the mass and...
7444857 Software synchronization of multiple scanning probes  
A method and apparatus for scanning multiple scanning probe microscopes in close proximity, to scan overlapping scan areas at the same time while avoiding collision employs a control system...
7442930 Method for correcting distortions in electron backscatter diffraction patterns  
A method is provided for correcting magnetic field distortions in an electron backscatter diffraction (EBSD) pattern. An EBSD pattern is firstly generated from a sample placed within an electron...
7442929 Scanning electron microscope  
A scanning electron microscope for digitally processing an image signal to secure the largest focal depth and the best resolution in accordance with the magnification for observation is disclosed....
7442926 Nano tip and fabrication method of the same  
The present invention relates to a nano tip and a fabrication method of the nano tip that is generally usable in mechanical, physical, and electrical devices for detecting surface signals or...
7442925 Working method using scanning probe  
The present invention provides a working method using a scanning probe which can enhance a working speed and prolong a lifetime of the probe. The present invention provides the working method using...
7442924 Repetitive circumferential milling for sample preparation  
A method of sample extraction entails making multiple, overlapping cuts using a beam, such as a focused ion beam, to create a trench around a sample, and then undercutting the sample to free it....
7442923 Scanning electron microscope  
To make it possible to observe the bottom of a contact hole and internal wires, in observation of the contact hole 102 , by scanning it at a predetermined acceleration voltage, the positive charge...
7439506 Method and an apparatus of an inspection system using an electron beam  
Problems encountered in the conventional inspection method and the conventional apparatus adopting the method are solved by the present invention using an electron beam by providing a novel...
7439505 Scanning electron microscope  
An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high...
7439502 Electron beam apparatus and device production method using the electron beam apparatus  
The purpose of the invention is to provide an improved electron beam apparatus with improvements in throughput, accuracy, etc. One of the characterizing features of the electron beam apparatus of...
7439501 Direct write nanolithography using heated tip  
A device for sculpting a substrate includes a vertically displaceable probe having a nano-scale dimensioned probe tip. A displacement mechanism is configured to adjust a vertical displacement...
7439500 Analyzing system and charged particle beam device  
The present invention relates to an analyzing system with improved detection scheme and a charged particle beam device comprising the same. The analyzing system for analyzing a beam of charged...
7435959 Microstructured pattern inspection method  
The edges of the reticle are detected with respect to the microstructured patterns exposed by the stepper, and the shapes of the microstructured patterns at the surface and at the bottom of the...
7435957 Charged particle beam equipment and charged particle microscopy  
On the basis of a displacement of the field of view before and after a deflection of a charged particle beam, extracted from a first specimen image, including a displacement of the field of view...
7435955 Scanning probe microscope control system  
A system for controlling the operation of a scanning probe microscope that greatly simplifies the microscope's operation is disclosed. The software design incorporates several advanced features...
7435954 Electron microscope, methods to determine the contact point and the contact of the probe  
An electron microscope suitable for observing at least one sample is provided. The sample has at least one testing area, and a material of the sample on the testing area is semiconductive or...
7432511 Method of operating liquid in the vacuum or low-pressure environment and observing the operation and device for the operation and observation  
A method of operating liquid in a vacuum or low-pressure environment and observing the operation and a device for the operation and the observation respectively, including the steps of preparing a...
7432503 Scanning electron microscope and method for detecting an image using the same  
In the present invention, in order to realize both a reduction of an image detecting time and high quality image detection in a scanning electron microscope for measurement, inspection, defect...
7432502 Information acquisition method and apparatus for information acquisition  
The invention is to provide a method and an apparatus for observing a substance having a stable morphology in a liquid medium such as water. The method comprises the steps of obtaining a...
7429733 Method and sample for radiation microscopy including a particle beam channel formed in the sample source  
A method and sample for radiation microscopy include a sample source that includes an area of interest, an outer side of a sample formed in the sample source adjacent to the area of interest, an...
7427757 Large collection angle x-ray monochromators for electron probe microanalysis  
X-ray monochromators and electron probe micro-analysis (EPMA) systems using such monochromators are disclosed. A turretless x-ray monochromator may have a cassette of reflectors instead of a...
7427756 Method of precision measurements of sizes and line width roughness of small objects in accordance with their images obtained in scanning electron microscope  
A novel method of precision measurements of sizes and line width roughness of small objects in accordance with their images obtained in scanning electron microscope, which is improvement of the...
7427755 Integrated electron beam tip and sample heating device for a scanning tunneling microscope  
An electron beam heating device with the temperature up to 2200 K is provided for heating a sample and a tip for a scanning tunneling microscope (STM). The electron beam heating device includes a...
7427754 Telegraph signal microscopy device and method  
A microscope device includes a probe having a dielectric material with a first side and a second side. First and second electrodes are disposed on the first side of the dielectric material. A...
7427753 Method of cross-section milling with focused ion beam (FIB) device  
A method of milling a cross section of a wafer and a milling device. The method includes a coarse scanning of at least two milling frames and a fine scanning of at least one milling frame. The...
7425712 Method of operating liquid in the vacuum or low-pressure environment and observing the operation and device for the operation and observation  
A method of operating liquid in a vacuum or low-pressure environment and observing the operation and a device for the operation and the observation respectively, including the steps of preparing a...
7425704 Inspection method and apparatus using an electron beam  
An inspection method and apparatus irradiates a sample on which a pattern is formed with an electron beam, so that an inspection image and a reference image can be generated on the basis of a...
Matches 1 - 50 out of 1483 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 >