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7258520 |
Methods and apparatus for using substrate carrier movement to actuate substrate carrier door opening/closing
A system for opening a substrate carrier includes a substrate carrier having an openable portion. The substrate carrier also has an opening mechanism coupled to the openable portion. A substrate...
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7255524 |
Substrate cassette mapper
A mechanism for mapping the contents of a cassette which is used for delivering substrates to a system for processing semiconductor and similar materials which is independent of load port or...
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7251021 |
Substrate transfer apparatus
A substrate transfer apparatus has pluralities of pairs of substrate support mechanisms. The substrate support mechanism includes a first roller provided on a first rotary shaft and a second roller...
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7246985 |
Work-piece processing system
A transfer system for use with a tool for processing a work-piece at low or vacuum pressure such as an ion implanter for implanting silicon wafers. An enclosure defines a low pressure region for...
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7246984 |
Method and apparatus for transferring an article to be processed and processing apparatus
A transferring apparatus transfers an article to be processed, which is carried by a carrier device, to a holder provided in a processing chamber defined by a processing vessel and adapted to hold...
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7244086 |
Apparatus for vacuum treating two dimensionally extended substrates and method for manufacturing such substrates
A vacuum transport chamber has a transport robot arrangement. A processing arrangement has at least one processing station communicating by at least one workpiece pass-through opening with the...
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7243003 |
Substrate carrier handler that unloads substrate carriers directly from a moving conveyor
In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station...
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7234908 |
Apparatus for storing and moving a cassette
A cassette stocker includes a plurality of cassette storage shelves positioned adjacent a cleanroom wall and vertically disposed relative to a plurality of cassette docking stations, and a cassette...
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7232286 |
Seal device and method for operating the same and substrate processing apparatus comprising a vacuum chamber
The present invention provides a seal device comprising a sealing passage which allows communication between a first space and a second space, and evacuation lines individually connected to the...
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7232284 |
Device for loading substrates into and unloading them from a clean room
The invention relates to a device for loading substrates into and unloading them from a clean room, comprising a lock device onto which a transport box for receiving the substrates can be placed...
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7230702 |
Monitoring of smart pin transition timing
A movable portion of a substrate carrier handler is extended into a transport path along which a substrate carrier transport system transports a substrate carrier, respective kinematic coupling...
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7226512 |
Load lock system for supercritical fluid cleaning
A substrate is transferred from an environment at about vacuum into a load lock through a first door. The substrate is then sealed within the load lock. The pressure within the load lock is raised...
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7217076 |
Semiconductor material handling system
The semiconductor material handling system is an EFEM that may either mount to the front end of a processing tool or be integrated into the processing tool. The EFEM is built from a unified frame...
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7214027 |
Wafer handler method and system
Systems and methods for handling wafers include retrieving a first wafer from a wafer cassette using a first arm, transferring the first wafer from the first transfer arm to a second arm,...
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7207763 |
Semiconductor manufacturing system and wafer holder for semiconductor manufacturing system
A semiconductor manufacturing system and wafer holder for a semiconductor manufacturing system which prevents a semiconductor wafer from being exposed to a process reaction and which includes a...
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7201551 |
Vacuum processing apparatus and semiconductor manufacturing line using the same
A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an...
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7198448 |
Vacuum process system
A vacuum process system comprises: a load port on which an object to be processed is set; a common transfer chamber disposed adjacent to the load port, having an internal space set at an...
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7198447 |
Semiconductor device producing apparatus and producing method of semiconductor device
A semiconductor device producing apparatus is disclosed. The apparatus includes a carrier-holding stage for placing a carrier; first, second and third stages each for holding first and second boats...
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7187994 |
Method of interfacing ancillary equipment to FIMS processing stations
This invention includes a method of integrating into a semiconductor specimen fabrication station a process diagnostic module that performs on the semiconductor specimen a processing operation that...
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7168911 |
Semiconductor handling robot with improved paddle-type end effector
A robotic semiconductor handling system includes two robot arms for transferring substrates between processing, cooling, and storage stations. The first robot arm has a paddle-type end effector...
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7168460 |
Apparatus for decanting pulverulent product and method which can be carried out using said apparatus
An apparatus for decanting pulverulent product (Q) into a receptacle ( 50 ) made of deformable material which receptacle is arranged in a container made of rigid material and is temporarily placed...
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7160417 |
Cassette for a load-lock
A cassette for holding substrate in a load-lock comprising an outer casing having a front surface with multiple slots and two sidewalls having holes at the bottom section thereof. Braces are set at...
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7153367 |
Drive mechanism for a vacuum treatment apparatus
The invention relates to a drive mechanism for a vacuum treatment apparatus by which substrate holders can be transported around an axis (A—A) from an entrance airlock to an exit airlock. A...
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7153088 |
Method and apparatus for transferring a semiconductor substrate
A method and apparatus for transferring a substrate is provided. In one embodiment, an apparatus for transferring a substrate includes at least one end effector. A disk is rotatably coupled to the...
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7147795 |
Method for surface treatment
A method for surface treatment includes: a first step in which a surface treatment apparatus 1 and a substrate 10 in a state where a front surface 102 of the substrate 10 faces the surface...
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7147424 |
Automatic door opener
A wafer carrier opener is provided. The wafer carrier opener may eliminate the use of two separate actuators by using a four-bar linkage mechanism. The wafer carrier opener includes a wafer carrier...
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7144813 |
Method and apparatus for thermally processing microelectronic workpieces
An apparatus for thermally processing a microelectronic workpiece is provided. The apparatus comprises a rotatable carousel assembly configured to support at least one workpiece. A driver is...
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7144213 |
Method for controlling flow of process materials
An apparatus and method for controlling the flow of a process material from a higher pressure environment to a lower pressure environment is provided. Each of a first and second chamber is divided...
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7139638 |
Substrate processing unit, method for detecting the position of a substrate and substrate processing apparatus
A thermal processing unit is connected to a substrate position detector, which is in turn connected to a bake unit controller. The thermal processing unit includes a temperature control plate and a...
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7134826 |
Substrate transfer apparatus, substrate processing apparatus and holding table
A loader includes a receiving section for receiving a FOUP (front opening unified pod), an opener for transporting substrates out of the FOUP, and a transport robot for transporting the FOUP...
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7134825 |
Device for handling substrates inside and outside a clean room
A device ( 10 ) for handling substrates ( 11 ) inside and outside a clean room ( 15 ) is provided with a locking transfer device ( 17 ), by which means a substrate cassette ( 12 ) that is...
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7114903 |
Apparatuses and method for transferring and/or pre-processing microelectronic workpieces
An apparatus and method for handling and/or pre-processing microelectronic workpieces. In one embodiment, the apparatus includes an input/output station configured to removably receive a plurality...
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7112027 |
Pod cover removing-installing apparatus
A pod cover removing-installing apparatus can open and close any covers for a variety of pods made by a various manufactures, can satisfy an allowable distortion error capable of being normally...
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7102124 |
Multi-axial positioning mechanism for a FIMS system port door
A multi-axial positioning system of unitary construction design selectively moves a port door along two transverse paths of travel toward and away from the aperture of a port plate. The positioning...
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7078708 |
Lithographic apparatus and method of manufacturing a device and method of performing maintenance
A lithographic apparatus includes an illumination system for providing a beam of radiation. The lithographic apparatus further includes: a support structure for supporting patterning device, the...
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7077614 |
Sorting/storage device for wafers and method for handling thereof
Sorting/storage device for wafers. A sorting device is provided in which at least two cassettes containing wafers may be present and the wafers are moved from one cassette to the other cassette or...
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7076920 |
Method of using a combination differential and absolute pressure transducer for controlling a load lock
A pirani absolute pressure sensor for sensing absolute pressure in a load lock in a range from 100 to 10 −4 torr and a differential pressure sensor for sensing a pressure difference between...
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7074000 |
Method and apparatus for undocking substrate pod with door status check
A pod loading station includes a docking mechanism adapted to move a pod between a docked position and an undocked position, and a door opener adapted to unlatch and open a pod door from the pod. A...
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7073999 |
Receiving container body for object to be processed
The present invention includes: a box case having a size capable of containing an open type of cassette that can hold a plurality of first objects to be processed and capable of containing a...
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7070379 |
Semiconductor fabrication apparatus having FOUP index in apparatus installation area
A semiconductor fabrication apparatus, located in an apparatus installation area, includes a front-opening unified pod (FOUP) index, a plate, a first transfer device, a second transfer device, and...
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7068925 |
Versatile semi-toroidal processing furnace with automatic and reconfigurable wafer exchange
The present invention comprises a fully automated, fabrication compliant furnace with the advantages of the horizontal and most of the advantages of the vertical furnace. One embodiment of the...
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7066703 |
Chuck transport method and system
A method and system for transporting a plurality of substrates between a transfer chamber and at least one processing chamber. The system includes a chuck assembly with a plurality of chucks...
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7059817 |
Wafer handling apparatus and method
A high-speed wafer-processing apparatus and method that employs a vacuum chamber having at least two wafer transport robots and a process station. The vacuum chamber interfaces with a number of...
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7058468 |
Automatic material handling system, production system for semiconductor device, and production management method for semiconductor device
It is an object to provide an AGV that enables preventing a substrate and a manufacturing system from being contaminated due to another substrate with an adhering contaminant generated in a...
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7057711 |
Lithography tool having a vacuum reticle library coupled to a vacuum chamber
A lithography tool includes an exposure chamber and a reticle handler that exchanges a reticle being exposed as prescribed by the user of the lithography tool. The reticle handler can include a...
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7048493 |
Method of manufacturing a semiconductor integrated circuit device which prevents foreign particles from being drawn into a semiconductor container containing semiconductor wafers
When a conventional semiconductor container opening/closing apparatus opens a lid of a semiconductor container, foreign particles enter into the container from outside through a gap between the...
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7048127 |
Lid unit for thin-plate holding container, thin-plate holding container, and simplified attaching/detaching mechanism
The present invention provides a lid unit for closing a container body used to transport thin-plates such as semiconductor wafers or the like accommodated therein. Simplified attaching/detaching...
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7039501 |
Method for determining a position of a robot
Generally, a method of determining a position of a robot is provided. In one embodiment, a method of determining a position of a robot comprises acquiring a first set of positional metrics,...
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7039499 |
Robotic storage buffer system for substrate carrier pods
A storage/buffering system for the stocking and/or buffering of substrate and/or substrate carriers in a process environment includes a 6-axis robot. An end-effector is connected with the robot...
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7033471 |
Sputter chamber as well as vacuum transport chamber and vacuum handling apparatus with such chambers
A Vacuum transport chamber for disk-shaped substrates, has a base plate structure has an interior surface which borders an interior of the chamber on one side thereof. A covering structure is...
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