Matches 151 - 200 out of 1077 < 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 >
Match Document Document Title
6869457 Clean room for semiconductor device  
A clean room has an equipment installation area where an apparatus for treating an object to be treated such as a semiconductor wafer is installed, a process area 4 where the object is loaded in...
6869263 Substrate loading and unloading station with buffer  
A substrate processing apparatus having a station for loading and unloading substrates from the apparatus, includes an aperture closure for sealing a loading and unloading aperture of the station,...
6869262 Vacuum apparatus and transfer apparatus  
A vacuum apparatus has a process chamber for processing a workpiece and a transfer apparatus for positioning the workpiece in the process chamber and for removing the workpiece from the process...
6866460 Apparatus and method for loading of carriers containing semiconductor wafers and other media  
An apparatus for loading media carriers into a processing chamber, including a pivoting arm mechanism which accepts a carrier in at a lower position, locks it on the arm, and provides a...
6863485 Conveyance system  
Wafer processing apparatus A-Z for performing processes A-Z on a wafer are arranged in a row. A chamber 14 is formed parallel to these wafer processing apparatus, and a guide rail 11 is...
6860417 Low shock work transport system for pressure vessels  
A low shock work transport system for moving workpieces into a pressure vessel without significant vibrations or mechanical shocks. The pressure vessel has two opposing ends with a sealable port in...
6858119 Mobile plating system and method  
An exemplary mobile plating system is provided for performing a plating process using virtually any known or available deposition technology for coating or plating as substrate. The mobile plating...
6858085 Two-compartment chamber for sequential processing  
An apparatus for sequential and isolated processing of a workpiece comprises a two compartment chamber and a mechanism to transfer the workpiece from one compartment to the other compartment. The...
6852644 Atmospheric robot handling equipment  
A semiconductor-manufacturing tool has two load locks, one for semiconductor wafers entering the tool for processing and the other for wafers leaving the tool after being processed. The load locks...
6852194 Processing apparatus, transferring apparatus and transferring method  
Processing apparatus is disclosed, that comprises substrate container holding table that can hold substrate container that contains plurality of target substrates, first transferring chamber,...
6848882 Apparatus and method for positioning a cassette pod onto a loadport by an overhead hoist transport system  
An apparatus and a method for positioning a cassette pod onto a loadport by an overhead hoist transport system are described. The apparatus includes a vertical front panel of a process machine...
6848876 Workpiece sorter operating with modular bare workpiece stockers and/or closed container stockers  
A reticle management system is disclosed including a sorter coupled to one or more stockers that allow a customized configuration of the overall reticle management system. The stockers may be bare...
6846149 Semiconductor wafer processing system with vertically-stacked process chambers and single-axis dual-wafer transfer system  
A semiconductor wafer processing system including a multi-chamber module having vertically-stacked semiconductor wafer process chambers and a loadlock chamber dedicated to each semiconductor wafer...
6837663 Loading and unloading station for semiconductor processing installations  
In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room...
6835039 Method and apparatus for batch processing of wafers in a furnace  
A method and apparatus for batch processing of semiconductor wafers in a furnace advantageously allow for wafers to be supported for processing at very high temperatures (e.g., about 1350° C.)....
6833035 Semiconductor processing system with wafer container docking and loading station  
A processor for processing integrated circuit wafers, semiconductor substrates, data disks and similar units requiring very low contamination levels. The processor has an interface section which...
6830651 Load port capable of coping with different types of cassette containing substrates to be processed  
A load port which can selectively receive plural types of cassette having substrate which are to be processed accommodated therein is disclosed. The load port has the following constituents. That...
6830623 Method of liquid deposition by selection of liquid viscosity and other precursor properties  
A plurality of liquids, the flow of each controlled by a volumetric flowrate controller, are mixed in a mixer to form a final precursor that is misted and then deposited on a substrate. A physical...
6827546 Modular frame for a wafer fabrication system  
A modular frame assembly for a wafer fabrication system comprising at least one base casting and at least one upstanding pod door opening casting. The at least one base casting and at least one...
6826451 Lithography tool having a vacuum reticle library coupled to a vacuum chamber  
A lithography tool includes an exposure chamber and a reticle handler that exchanges a reticle being exposed as prescribed by the user of the lithography tool. The reticle handler can include a...
6824344 Drive-section-isolated FOUP opener  
A drive-section-isolated FOUP opener opens and closes a door of a FOUP which contains a plurality of semiconductor wafers. The FOUP opener includes a dock plate for carrying and positioning the...
6824343 Substrate support  
A method and apparatus for supporting a substrate is generally provided. In one aspect, an apparatus for supporting a substrate includes a support plate having a first body disposed proximate...
6821082 Wafer management system and methods for managing wafers  
A wafer management system has a first stationary wafer storage system ( 100 ) with a first buffer ( 110 ) for storing a plurality of wafers in slots, a first load-and-unload station ( 115 ) for...
6818108 Chamber for the transport of workpieces in a vacuum atmosphere, a chamber combination and a method for transporting a workpiece  
A vacuum chamber for transporting at least one workpiece has two or more openings defining respective opening areas for treating or handling the at least one workpiece. A transport device is...
6817823 Method, device and system for semiconductor wafer transfer  
The invention relates to a wafer transfer system that achieves high efficiency, as measured by throughput rate. This is accomplished in one instance by the combination of reliable transfer of...
6817822 Load port, wafer processing apparatus, and method of replacing atmosphere  
Atmosphere inside a wafer carrier is purged through an open face of the wafer carrier, in the state where a carrier door constituting a face of the wafer carrier is opened by a load port door....
6811369 Semiconductor fabrication apparatus, pod carry apparatus, pod carry method, and semiconductor device production method  
In a semiconductor fabrication apparatus, a pod that receives a single substrate using a substrate supporting table and a lid member in a sealing state is loaded from outside of a chamber and the...
6808592 High throughput plasma treatment system  
A system for the plasma treatment of parts. The system includes a chamber base sealingly engageable with a reaction chamber to form a treatment chamber and a lifting device operable to lift the...
6808352 Method for transporting boards, load port apparatus, and board transport system  
A substrate container having substrates stored therein and sealed with a door is placed onto a load port apparatus provided on a substrate processing system, and a door of the load port apparatus...
6802934 Processing apparatus  
Two load lock chambers 130 and 132 are arranged between a first transfer chamber 122 and a second transfer chamber 133 . Each of the load lock chambers is capable of accommodating a single...
6799932 Semiconductor wafer processing apparatus  
A processor for processing articles, such as semiconductor wafers, in a substantially clean atmosphere is set forth. The processor includes an enclosure defining a substantially enclosed clean...
6796763 Clean box, clean transfer method and system  
A clean box is composed of a box body having an opening in one surface thereof and a lid member for closing the opening. An annular groove is formed so as to surround the opening on one of the box...
6795202 Wafer processing apparatus having wafer mapping function  
If a plurality of wafers are placed on each shelf of a rack in a pod, some problems will arise in processing processes. In addition, in some apparatus for detecting wafers, driving means having a...
6781139 Load lock vacuum conductance limiting aperture  
An apparatus in combination with a load lock of an ion implanter comprises a cover adjacent an isolation valve slot of the load lock. The cover defines an aperture generally conforming to the size...
6779962 Device for handling flat panels in a vacuum  
A linear motion assembly is provided as part of a robot for processing substrates in a vacuum. An effector assembly is mounted for linear movement on linear bearings. The end effectors are driven...
6776567 Valve/sensor assemblies  
In a first aspect, a valve/sensor assembly is provided that includes a door assembly. The door assembly has (1) a first position adapted to seal an opening of a chamber; (2) a second position...
6772805 In-situ purge system for article containers  
An in-situ purge system for charging the interior of a semiconductor wafer pod with nitrogen gas after the pod is exposed to ambient moisture, air and particles in a clean room. A gas supply line...
6767170 Wafer handling system and wafer handling method  
A wafer holder has a set of minimum contact wafer support members predefining support member contacting portions on a planar wafer surface of a wafer. The wafer chuck has a wafer support region for...
6764265 Erosion resistant slit valve  
Embodiments of the present invention provide structures for reducing erosion of a slit valve utilized in the fabrication of semiconductor devices. Specifically, non-metallic slit valve components...
6758647 System for producing wafers  
A system and method of manufacturing wafers are provided suitable for a semiconductor manufacturing system and a method thereof capable of shortening the processing period composed of a series of...
6755980 Process to remove solid slag particles from a mixture of solid slag particles and water  
Process to remove solid slag particles from a mixture of solid slag particles and water present in a quench zone, which quench zone is part of a process for the preparation of synthesis gas by...
6755602 Wafer transport pod with linear door opening mechanism  
A pod for transporting a cassette of semiconductor wafers that is equipped with a linearly operated door opening/closing mechanism is provided. The pod includes a body member, a cover member and a...
6752580 Vacuum processing apparatus and semiconductor manufacturing line using the same  
A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an...
6752579 Vacuum processing apparatus and semiconductor manufacturing line using the same  
A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an...
6746239 Substrate feed chamber and substrate processing apparatus  
A substrate feed chamber that is equipped in a substrate processing apparatus is provided. The substrate feed chamber has a storage tray capable of storing simultaneously three or more substrate...
6746198 Substrate transfer shuttle  
The present invention provides an apparatus and method for substrate transport. In systems according to the invention, at least a first and second chamber are provided. The first chamber may be a...
6746197 Substrate processing apparatus and substrate processing method  
A substrate processing apparatus comprises a processing section for performing processing for a substrate, a substrate carrier transfer section into/out of which a substrate carrier holding a...
6746196 Vacuum treatment device  
A vacuum treatment device, comprising a vacuum treatment chamber ( 1 ) etching a semiconductor wafer (W) as a body to be treated and a preliminary vacuum chamber ( 2 ) communicating with the vacuum...
6746195 Semiconductor transfer and manufacturing apparatus  
A transfer apparatus has a transfer robot for transferring wafers between a process chamber and a pre-pressurizing chamber. The process chamber and pre-pressurizing chamber are arranged in a...
6742978 Wafer indexing device  
An indexing device including a housing, a cassette support mechanism, a cassette, and transport apparatus carried by the housing. The transport apparatus includes a bed of rollers having a common...
Matches 151 - 200 out of 1077 < 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 >