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6419438 |
FIMS interface without alignment pins
A front opening interface mechanical standard, or “FIMS”, system is disclosed for ensuring proper registration of a pod door against a port door on a load port assembly without the use of guide...
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6417014 |
Method and apparatus for reducing wafer to wafer deposition variation
A processing line includes a processing tool and an automatic process controller. The processing tool is adapted to deposit a layer of material on a semiconductor wafer based on an operating...
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6410455 |
Wafer processing system
A wafer processing system occupies minimal floor space by using vertically mounted modules such as reactors, load locks, and cooling stations. Further saving in floor space is achieved by using a...
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6409448 |
Ergonomic load port
A load port module is mounted adjacent a process tool for loading semiconductor wafers to the process tool and unloading them from the process tool. The module includes a mounting frame having a...
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6406245 |
Processing system and device manufacturing method using the same
A processing system is disclosed which includes first and second chambers, each for accommodating a processing apparatus therein, each chamber being able to be kept gas tight, a coupling member for...
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6398475 |
Container
A container for receiving and transporting dust free articles which is opened and closed by inserting a positioning pin and a key in an opener mechanism into a positioning hole and a key hole...
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6395094 |
Process system with transfer unit for object to be processed
A process system comprises cassette housing chambers 33 A and 33 B, each of which houses therein a cassette C having housed an object W to be processed, and process chambers 26 A through 26 D...
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6394733 |
Substrate body transfer apparatus
A substrate body transfer apparatus which is capable of isolating the atmospheres of an external processing apparatus and an air conveyance apparatus and preventing the mutual contamination...
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6390754 |
Wafer processing apparatus, method of operating the same and wafer detecting system
A closed-type cassette is mounted on a cassette stand disposed in a working region at a position corresponding to an opening formed in a wall separating the working region from a loading region....
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6390448 |
Single shaft dual cradle vacuum slot valve
A single slot valve shaft is in a vacuum body between adjacent vacuum chambers, such as a process module and a transport module. Separate valves are provided on the single shaft actuator for each...
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6385503 |
Reactor for the processing of wafers, with a protection device
The invention relates to a reactor ( 1 ) for processing wafers ( 7 ) comprising at least one process chamber ( 5 ), at least one transport chamber ( 2 ) with a transport robot ( 3 ) for the wafers...
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6382902 |
Method for controlling handling robot
A handling robot control method is disclosed for a handling robot disposed in a transfer chamber ( 1 ) having a plurality of process chamber stations ( 2 e ) arranged around it in communication...
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6382896 |
Front-opening unified pod closing/opening control structure
A front-opening unified pod closing/opening control structure includes a transmission motor controlled to rotate a transmission shaft, causing the transmission shaft to rotate two worm gear sets...
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6382895 |
Substrate processing apparatus
Four load lock chambers 2, 2′, 2″, 2 ′″ and eight process chambers 101, 102, 103, 104, 105, 106, 107 and 108 are hermetically connected around the outside of a central separation...
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6371712 |
Support frame for substrates
The present invention generally provides a system and method for supporting a substrate having a support frame that minimizes deflection encountered during thermal expansion in a processing...
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6371711 |
Valveless continuous atmospherically isolated container feeding assembly
An apparatus for feeding containers of feed material into a process chamber is disclosed. The apparatus is designed to maintain the atmosphere within the process chamber as separate from the...
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6368411 |
Molecular contamination control system
The system and method for molecular contamination control permits purging a SMIF pod to desired levels of relative humidity, oxygen, or particulates. The SMIF pod includes an inlet port including a...
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6366830 |
Self-teaching robot arm position method to compensate for support structure component alignment offset
A self-teaching robot arm positioning method that compensates for support structure component alignment offset entails the use of a component emulating fixture preferably having mounting features...
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6364593 |
Material transport system
A system for loading and unloading semiconductor wafers includes a frame having a charging opening, a platform mounted on the frame and movable between a deployed position and a retracted position,...
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6364592 |
Small footprint carrier front end loader
An apparatus for moving substrates between a loading section and a working chamber includes at least two loading locations at which the substrates may be supplied or received in stacked form...
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6358377 |
Apparatus for sputter-coating glass and corresponding method
A sputter coating apparatus includes at least a first sputter coating line and a second sputter coating line. The first and second sputter coating lines may be operated in parallel with one another...
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6356808 |
Method for cell alignment and identification and calibration of robot tool
A method for cell alignment, identification and calibration of part of a robot tool, preferably a part of the robot tool, is positioned close to a detector, whereupon it is moved repeatedly past...
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6354781 |
Semiconductor manufacturing system
An improved manufacturing system for processing semiconductor wafers which includes a (1) plurality of processing stations, (2) a sealed transport tunnel located directly over the processing...
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6354445 |
Rack holding device
A rack-holding device with an attachment surface ( 1 ), which device has as least two side guides ( 2 ) and at least one stop ( 3 ), the stop ( 3 ) being arranged in each case in front of the at...
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6352403 |
Controlled environment enclosure and mechanical interface
A system for vacuum-processing objects such as electronic integrated circuit wafers comprises (a) a carrier for transporting the wafers under vacuum in a cassette, the cassette being supported on a...
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6350097 |
Method and apparatus for processing wafers
An apparatus for processing wafers one at a time. The apparatus has a vacuum chamber 1 into which wafers are loaded through a pair of loadlocks 3, 4 which are spaced one above the other. A...
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6347990 |
Microelectronic fabrication system cleaning methods and systems that maintain higher air pressure in a process area than in a transfer area
A microelectronic fabrication system that includes a service area, a process area in the service area where microelectronic devices are processed, and a transfer area in the service area where...
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6347919 |
Wafer processing chamber having separable upper and lower halves
A wafer processing apparatus includes a processing chamber having a top chamber portion and a bottom chamber portion, respectively. The apparatus further includes an annular ring valve associated...
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6347918 |
Inflatable slit/gate valve
A sealable door assembly including a frontplate which faces an opening to be sealed, a backplate operatively coupled to the frontplate, and at least one inflatable member located between the...
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6338626 |
Load-lock mechanism and processing apparatus
A load-lock mechanism according to the invention comprises a vacuum chamber 31 arranged between a vacuum first transferring chamber 20 and atmospheric second transferring chambers 40 . The...
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6338604 |
Lid latch mechanism for clean box
A latch mechanism for latching a lid of a clean box having a box body opening at one surface and a lid for closing the opening includes a latch member pivotal about a shaft mounted on the box body,...
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6334751 |
Air lock
Air lock for introducing and continuously passing a strip of a substrate into and through a vacuum chamber, including an enclosure containing at least three successive rollers in the direction of...
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6332898 |
Substrate processing apparatus and maintenance method therefor
A substrate processing apparatus comprises a semiconductor wafer processing chamber, a wafer transfer device, a wafer cassette holding unit, a wafer cassette transfer device and a wafer cassette...
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6325856 |
Vacuum treatment equipment
A vacuum treatment system has an outer housing which defines a substantially cylindrical inner wall around an axis. At least two openings are provided for treating or conveying-through a respective...
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6319373 |
Substrate transfer apparatus of substrate processing system
A substrate transfer system is used in an in-line film deposition system. The substrate transfer system is provided with an auxiliary vacuum chamber and a main vacuum chamber. The auxiliary vacuum...
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6318953 |
SMIF-compatible open cassette enclosure
An ergonomic loading assembly for an I/O port onto which a bare cassette may be easily loaded and unloaded. The loading assembly further provides isolation between the operator and the I/O port...
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6318948 |
Substrate transfer apparatus and substrate processing apparatus
This invention related to a substrate transfer apparatus having an arm holder moving into and out of a cassette while a substrate is mounted thereon, a forward and backward driving mechanism for...
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6318945 |
Substrate processing apparatus with vertically stacked load lock and substrate transport robot
A substrate processing apparatus substrate transport and load lock assembly comprising a first load lock, a first substrate elevator, and a transport robot. The substrate elevator has a first...
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6318944 |
Semiconductor fabricating apparatus, method for modifying positional displacement of a wafer in a wafer cassette within the semiconductor fabricating apparatus and method for transferring the wafer cassette
A semiconductor fabricating apparatus having a vertical reaction furnace, a boat for holding plural wafers in a multi-layered fashion and being loaded into the vertical reaction furnace, a storage...
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6315879 |
Modular deposition system having batch processing and serial thin film deposition
A flexible, modular thin film deposition machine comprises a number of batch process stations which define a batch process path. At least one of the batch process stations is a thin film deposition...
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6315512 |
Systems and methods for robotic transfer of workpieces between a storage area and a processing chamber
A workpiece handling system with dual load locks, a transport chamber and a process chamber. Workpieces may be retrieved from one load lock for processing at vacuum pressure, while workpieces are...
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6305895 |
Transfer system for vacuum process equipment
A transfer system 7 for carrying a wafer W into/out of a process chamber 4 is provided in a box 10 defining a load-lock chamber 3. The box 10 is divided into a first chamber 11 and a second chamber...
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6302927 |
Method and apparatus for wafer processing
A wafer treatment apparatus is divided into a working zone (S1) and a loading zone (S2) by a wall (2). A closed wafer cassette(3) has a cassette body 31 having a bottom wall provided witha normally...
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6291801 |
Continual flow rapid thermal processing apparatus and method
A rapid thermal processing apparatus and a method of using such apparatus for the continuous heat treatment of at least one workpiece, which apparatus includes a cavity of generally elongated...
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6291252 |
Automatic method to eliminate first-wafer effect
A method of manufacturing semiconductor wafers in a processing tool in which it is determined whether the tool has been on idle beyond a predetermined period of time. If the tool has not been on...
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6290824 |
Magnetic film forming system
A magnetic film forming system which can always apply a magnetic field to a substrate in a constant direction. The magnetic film forming system comprises a vacuum container, a substrate pallet for...
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6287386 |
Carousel wafer transfer system
The present invention generally provides a rotary wafer carousel and related wafer handler for moving wafers or other workpieces through a processing system, i.e., a semiconductor fabrication tool....
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6286230 |
Method of controlling gas flow in a substrate processing system
A method of transferring and processing a substrate in an evacuable chamber which is located adjacent a process chamber and back-to-back process chambers, and other combinations of evacuable...
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6283692 |
Apparatus for storing and moving a cassette
A cassette stocker includes a plurality of cassette storage shelves positioned adjacent a cleanroom wall above a cassette docking station, and a cassette mover to carry a cassette between the...
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6282459 |
Structure and method for detection of physical interference during transport of an article
A method for detecting physical interference with desired transport of an article. The method includes the step of detecting an operative acoustic signal representing the structure-borne sound...
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