DETAILED DESCRIPTION OF THE EMBODIMENTS

[0044] <First Embodiment>

[0045] FIGS. 6A and 6B show a heater 31 according to a first embodiment. This heater 31 includes a plate 32 and a resistant heater element 33 embedded in the plate. A fundamental structure of the heater element 33 corresponds to the heater element 3 of the heater 1 shown in FIG. 1 .

[0046] The whole plate 32 is formed in a disk shape and its upper surface contacts an object to be heated and serves as a heating surface 32 a for heating the object to be heated. The heating surface 32 a is flat but may be formed to have a pocket shape having a concave portion contacting the object to be heated. The heating surface 32 a may be embossed or processed to have unevenness such as grooves. Note that, as the object to be heated, substrates such as a semiconductor wafer and a liquid crystal substrate, for example, are enumerated. These substrates are placed on the heating surface 32 a.

[0047] As a material of the plate 32 , ceramics such as aluminum nitride, silicon nitride, silicon carbide and alumina can be used. This plate 32 is formed in a disk shape having a predetermined radius and a predetermined thickness. The radius of the plate 32 is selected in accordance with a radius of the object to be heated. When the object to be heated is a semiconductor wafer, the plate 32 is set to have a diameter of 200 to 300 mm, for example. The thickness of the plate 32 is set within a range in which the ceramics can be sintered and have a predetermined strength. When the object to be heated is a semiconductor wafer, the thickness of the plate 32 is set 10 to 20 mm.

[0048] In the plate 32 , a plurality of through-holes 34 are formed, through which a lift pin pushing up the object to be heated penetrates. As shown in FIG. 6 A, three of the through-holes 34 , for example, are formed in a radially intermediate portion of the plate 32 so as to have even intervals from the center of the plate 32 .

[0049] In the plate 32 , a concave hole part for positioning the object to be heated may be formed. Furthermore, an element for a high frequency electrode, an electrode element for an electrostatic chuck and the like can be also embedded in the plate 32 .

[0050] The resistant heater element 33 embedded in the plate 32 has a wiring pattern shown in FIG. 6 A, which is formed by processing a linear, coil-shaped, ribbon-shaped, mesh-shaped, plate-shaped, or film shaped element.

[0051] Note that, the resistant heater element 33 may be provided on a surface of the plate 32 or on its reverse-side instead of being embedded therein. However, by being embedded in the plate 32 , the resistant heater element 33 can be protected from oxidization, rusting and corrosion.

[0052] As a material of a resistant heater element used for the resistant heater element 33 , molybdenum, tungsten and alloy of molybdenum and tungsten are preferably used. Besides the above, other high-resistance metal and a material containing high-resistance metal can be also used.

[0053] The resistant heater element 33 has terminals 35 and 36 for input/output of electric power. These terminals 35 and 36 are positioned in a center portion of the plate 32 . By use of these terminals 35 and 36 as starting points, the resistant heater element 33 is disposed to be axisymmetric on the left and right sides of a center line of the plate 32 .

[0054] Moreover, in the resistant heater element 33 , a plurality of arc parts 37 are disposed radially at even intervals, the arc parts taking the terminals 35 and 36 as their starting points and having different diameters from each other. Thus, the resistant heater element 33 is disposed in the plate 32 so as to have a concentric wiring pattern. Furthermore, the adjacent arc parts 37 are connected to each other by connection parts 38 extending in the diameter direction. Both ends of each connection part 38 are corner parts 39 . The connection part 38 and the both corner parts 39 and 39 constitute a folding part A. Specifically, the inner arc parts 37 are connected to the connection parts 38 by folding their terminal portions radially by use of the corner parts 39 and further connected to the outer arc parts 37 by folding terminal portions of the connection parts 38 in a circumferential direction by use of the corner parts 39 . Accordingly, by being folded more than once at the plurality of the folding parts A, the entire resistant heater element 33 is formed to have the concentric wiring pattern in a continuous state. Thus, the terminals 35 and 36 are serially connected by the resistant heater element 33 . Moreover, the concentric wiring pattern is disposed on approximately the entire surface of the plate 32 . Note that, the folding part A is one embodiments of the flexure of this invention.

[0055] In the heater according to the first embodiment, the folding parts A are formed to be wider than a general part B that is a region other than the folding parts A and the vicinity thereof and thus a thermal uniform pattern part is formed. Specifically, a space between wirings before folding and after folding with respect to the folding part A is approximately the same as a width L3 in the general part B and the space is width L4 in a region other than the folding part and the vicinity thereof. The width L4 is wider than width L3. Hereinafter, L4 indicates a width of the folding part.

[0056] With reference to FIG. 7, a structure of this thermal uniform pattern part will be described more in detail below.

[0057] In FIG. 7 , reference numerals 37 a - 1 and 37 a - 2 are arc parts in the same diameter portion and reference numerals 37 b - 1 and 37 b - 2 are arc parts in a diameter portion outside the above ones. The arc parts 37 a - 1 and 37 b - 1 are connected by a connection part 38 a - 1 in the diameter direction and the arc parts 37 a - 2 and 37 b - 2 are connected by a connection part 38 b - 2 in the diameter direction. Arc parts 37 c - 1 , 37 c - 2 , 37 d - 1 and 37 d - 2 are also in a disposition relationship similar to the above. The arc parts 37 c - 1 and 37 d - 1 are connected by a connection part 38 c - 1 in the diameter direction and the arc parts 37 c - 2 and 37 d - 2 are connected by a connection part 38 d - 2 in the diameter direction. These arc parts and connection parts are connected by use of approximately round swollen parts 39 which are formed at the corner parts and protrude outward.

[0058] With the structure as described above, the folding parts A include the connection parts connecting the arc parts adjacent in the diameter direction and the swollen parts 39 at the both ends thereof. For example, the connection part 38 a - 1 connecting the arc parts 37 a - 1 and 37 b - 1 has the swollen part 39 at its both ends and the connection part 38 b - 2 connecting the arc parts 37 a - 2 and 37 b - 2 has the swollen part 39 at its both ends. The relationship between the other arc parts and connection parts is similar to the above one.

[0059] As described above, in the folding part A of this embodiment, the round swollen parts 39 shown in FIG. 7 are formed at the corners of the ends of the connection part 38 a - 1 so as to obtain width L4 of the folding part. The width L4 is wider than the width L3 in general part B, which is a space between the arc parts 37 a - 1 and 37 b - 1 . That is, L4>L3.

[0060] By use of such a dimensional relationship, the swollen parts 39 of the folding parts A are in a state of being close to each other between the adjacent arc parts. For example, the swollen part 39 outside the connection part 38 a - 1 connecting the arc parts 37 a - 1 and 37 b - 1 and the swollen part 39 inside the connection part 38 c - 1 connecting the arc parts 37 c - 1 and 37 d - 1 are in the state of being close to each other. Accordingly, the resistant heater element generates heat in the state where the swollen parts 39 are close to each other. Thus, heat can be spread between the swollen parts 39 . Specifically, the heat generated at the folding part A can be spread to its surrounding and thus good heat generation can be achieved in a surrounding area 40 surrounded by the swollen parts 39 . Consequently, the occurrence of a cool spot can be prevented in this surrounding area 40 . Therefore, thermal uniformity of the entire plate 32 can be improved.

[0061] As described above, the formation of the swollen parts 39 narrows the space between the adjacent swollen parts 39 . Accordingly, the area including the four swollen parts 39 adjacent to each other can be made smaller than an area in the case of forming no swollen part 39 . Thus, thermal uniformity can be improved. Consequently, in the case where the area can be made small, the swollen parts 39 are not always provided at the both ends of the connection part 38 but may be formed at one end thereof.

[0062] FIGS. 8A and 8B show modified examples of the swollen part 39 . Specifically, as shown in FIG. 8A, a swollen part 39 a is formed in an approximately round shape, which is swollen while protruding outward from the arc part 37 a - 1 (or 37 b - 1 ) and the connection part 38 a - 1 . Meanwhile, the swollen part 39 shown in FIG. 7 is formed in an approximately round shape, which is swollen while protruding outward only from the arc part 37 a - 1 , for example.

[0063] As shown in FIG. 8B, a swollen part 39 b is formed as a tapered top portion, which becomes gradually wider from the general part B, for example, the arc part 37 a - 1 (or 37 b - 1 ). The formation of these swollen parts 39 a and 39 b can make the width L4 of the folding part A wider than the width L3 of the other general part B. Thus, it is possible to achieve operations and effects similar to those obtained by the swollen parts 39 .

[0064] Moreover, as shown in FIG. 9 , it is preferable that the width L4 of the folding part A is made wider so as to have a relationship of L4≧L3×1.1 with the width 13 of the general part B by forming the swollen parts 39 ( 39 a or 39 b ). In this event, 1 mm or more is secured for a space L5 between the folding parts A and A.

[0065] Here, in the resistant heater element 33 of this embodiment, an avoidance part as the thermal uniform pattern part is formed for the through-hole 34 as the hole part. A structure of this avoidance part will be described with reference to FIG. 10 .

[0066] In FIG. 10 , arc parts 37 e are closest to the through-hole 34 , the arc parts 37 f are positioned outside the arc part 37 e and is second closest to the through-hole 34 after the arc part 37 e and arc parts 37 g are positioned outside the arc part 37 f . In areas of these arc parts 37 e to 37 g , which correspond to the through-hole 34 , avoidance parts 45 to 47 which are curved in a direction of getting away from the through-hole 34 to avoid the through-hole 34 are formed. These avoidance parts 45 to 47 are curved while having intervals similar to those of the arc parts 37 e to 37 g.

[0067] Furthermore, the avoidance parts 45 to 47 are set in such a manner that their radii of curvature are sequentially increased as they move away from the through-hole 34 . Specifically, when it is assumed that the radius of curvature of the avoidance part 45 is R1, the radius of curvature of the avoidance part 46 is R2 and the radius of curvature of the avoidance part 47 is R3, the avoidance parts are set to have a relationship of R1<R2<R3.

[0068] In such a manner, the radii of curvature R1 to R3 of the avoidance parts 45 to 47 are sequentially increased as the avoidance parts get away from the through-hole 34 . Thus, without making the avoidance parts 45 to 47 close to each other, the heat amount in the avoidance parts 45 to 47 becomes approximately the same as that of the surrounding thereof. Accordingly, a hot area never occurs in the portion of forming the through-hole 34 and thermal uniformity of the entire plate 32 can be improved.

[0069] <Second Embodiment>

[0070] FIG. 11 is a view showing a structure of a resistant heater element of a heater according to a second embodiment. A fundamental structure of the heater is the same as that of the heater according to the first embodiment. The heater of this embodiment includes a plate 32 and resistant heater elements 12 and 13 embedded in the plate. A fundamental structure of the resistant heater element corresponds to that of the resistant heater element of the heater 1 shown in FIG. 2 .

[0071] In this heater, a thermal uniform pattern part is formed for a wiring pattern in which a plurality of element lines separated by use of terminals are disposed in concentric circles. Another configuration with the same structure is similar to that shown in FIGS. 2 and 5 and thus the same constituent components as those in FIGS. 2 and 5 are denoted by the same reference numerals.

[0072] The resistant heater element in the heater according to the second embodiment has a wiring pattern in which a plurality of element lines 12 ( 13 ) separated by use of terminals 12 a and 12 b ( 13 a and 13 b ) for input/output of electric power are disposed. Each of the element lines has a winding pattern. Each element line has a spiral pattern. The element line passes between the terminals 12 a and 12 b ( 13 a and 13 b ) by means of a flexure 51 , and the flexure 51 has a swollen part in an asymptotic direction to an adjacent portion of the adjacent same element line or another element line.

[0073] FIG. 12 shows element patterns in and around the flexures. Here, the adjacent portion of the element line is, in FIG. 12, a flexure 52 of another element line 13 , which is adjacent to a flexure 51 of the element line 12 . In FIG. 13 , the adjacent portion of the element line is terminal connection parts C and C connected to the terminals 12 a and 12 b of the same element line 12 adjacent to the flexure 51 of the element line 12 .

[0074] FIG. 12 is a partially enlarged view of the element lines 12 and 13 according to the second embodiment. The element line 12 has the terminals 12 a and 12 b at its both ends and the element line 13 has the terminals 13 a and 13 b at its both ends. The element line 12 includes an inner arc part 12 c and an outer arc part 12 d , and these arc parts 12 c and 12 d are connected to each other by use of the flexure 51 which is provided between the terminals 12 a and 12 b . Similarly, in the element line 13 , an inner arc part 13 c and an outer arc part 13 d are connected to each other by use of the flexure 52 which is provided between the terminals 13 a and 13 b.

[0075] In the respective flexures 51 and 52 , formed are swollen parts 51 a and 52 a which are asymptotic to each other so as to narrow a space between the adjacent flexures 51 and 52 .

[0076] Accordingly, the flexures 51 and 52 are adjacent to each other in the diameter direction and lengths thereof are set to be larger than a space between the corresponding arc parts. For example, a length L6 of the flexure 51 in the element line 12 is set to be larger than a space L7 between the inner and outer arc parts 12 c and 12 d of the element line 12 (L6>L7). Similarly, in the element line 13 , the length of the flexure 52 is set to be larger than a space between the inner and outer arc parts 13 c and 13 d.

[0077] By setting the length of the flexures as described above, heat is generated while the adjacent flexures 51 and 52 are close to each other. Thus, a space between these flexures never becomes a cool spot. Consequently, the thermal uniformity of the entire plate 32 can be improved.

[0078] FIG. 13 shows a modified example according to the second embodiment. The element line 12 includes the terminal connection parts C and C connected to the terminals 12 a and 12 b at its both ends and the inner and outer arc parts 12 c and 12 d . These arc parts 12 c and 12 d are connected by use of the flexure 51 which is provided between the terminals 12 a and 12 b.

[0079] In the flexure 51 , swollen parts 51 b and 51 c asymptotic to the terminal connection parts C and C are formed so as to narrow a space between the swollen parts and the adjacent terminal connection parts.

[0080] According to the above setting, heat is generated while one of the adjacent terminal connection parts C and the swollen part 51 b are close to each other and the other terminal connection part C and the swollen part 51 c are close to each other. Consequently, spaces 54 a and 54 b therebetween never become cool spots. Thus, the thermal uniformity of the entire plate can be improved.

EXAMPLE

[0081] By use of nitride aluminum as a material, the disk-shaped plate 32 shown in FIG. 6A was manufactured by using a hot-press method. The diameter of the plate 32 is 250 mm and the thickness thereof was 10 mm. In the plate 32 , three through-holes 34 for a lift pin are provided at even intervals in a circumferential direction. Moreover, in molding, a coil-shaped resistant heater element 33 made of molybdenum was embedded in the plate.

[0082] In the resistant heater element 33 , as shown in FIG. 10 , the avoidance parts 45 and 46 having the radii of curvature R1 and R2, respectively, were formed around the through-holes 34 . Herein, R1 was 9 mm and R2 was 18 mm. Moreover, the width L4 of the folding part 39 in the wiring pattern shown in FIG. 7 was 18 mm and the width L3 before and after the folding part was 15 mm. Note that the folding part 39 was formed in a curved shape.

COMPARATIVE EXAMPLE

[0083] A plate was manufactured by use of the same materials and sizes as those used in the example, the plate having similar through-holes provided therein. In this plate, a resistant heater element made of the same material as that of the example was embedded. In this resistant heater element, no avoidance part was formed around the through-holes and the small arc part 7 having a radius of curvature of 9 mm was formed as shown in FIG. 4 . Moreover, as shown in FIG. 3 , both of the width L2 of the folding part in the wiring pattern and the width L1 before and after the folding part were set to 15 mm. Note that the folding part was not formed in a swollen shape and/or a curved shape but was folded at a sharp angle.

Result

[0084] The heaters of the example and the comparative example were heated to 400° C. by use of electric power supplied thereto and the temperature was retained. In this state, the cool spot 20 shown in FIG. 3 occurs around the folding parts and the hot spot 21 shown in FIG. 4 occurred around the through-holes in the comparative example. Consequently, a result is obtained that the thermal uniformity of the entire plate in the comparative example is worse than that of the example by 5° C.

[0085] Furthermore, in the case of heating the heaters of the example and the comparative example to 700° C. and retaining the heaters in this state, a result is obtained that the thermal uniformity of the comparative example was worse than that of the example by 10° C. Thus, it is found out that the example includes better thermal uniformity than the comparative example.

[0086] Although the inventions have been described above by reference to certain embodiments of the inventions, the inventions are not limited to the embodiments described above. Modifications and variations of the embodiments described above will occur to those skilled in the art, in light of the above teachings.